Nanocrystalline silicon superlattices for nanoelectronic devices

被引:0
|
作者
Tsybeskov, Leonid [1 ]
机构
[1] New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA
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D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper provides a brief introduction to a novel nanostructured system consisting of ordered layers of Si nanocrystals separated by atomically flat and chemically abrupt layers of amorphous silicon dioxide with thickness of several nanometers. The unique structural, optical and electrical properties permitting unusual device application are discussed.
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页码:304 / 307
页数:4
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