Microfabricated fluxgate sensors with low noise and wide bandwidth

被引：21
|
作者：
Robertson, PA [1 ]
机构：
[1] Univ Cambridge, Dept Engn, Photon & Sensors Grp, Cambridge CB2 1PZ, England
来源：
ELECTRONICS LETTERS | 2000年 / 36卷 / 04期
关键词：
Amorphous alloys - Amorphous films - Cobalt alloys - Copper - Glass - Magnetic flux - Magnetic thin films - Magnetron sputtering - Microsensors - Solenoids - Spurious signal noise - Sputter deposition;
D O I：
10.1049/el:20000308
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Miniature fluxgate magnetic sensors have been micro-fabricated using thin film planar technology on glass substrates. The 1000 x 200 mu m sensors comprise a copper multilayer solenoid winding with a thin amorphous cobalt alloy core deposited by RF magnetron sputtering. The bandwidth and sensitivity of a closed-loop sensor system using these novel devices is 0-2.5MHz and 5000V/T, respectively, with a spectral noise density of 2nT/root Hz at 10kHz.
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页码：331 / 332
页数：2
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