Methanol Vapor Sensing by Porous Silicon

被引：0
|
作者：
Yilmaz, O. [1 ,2 ]
Kayahan, E. [1 ,2 ,3 ]
Goren, F. [1 ,2 ]
Dumludag, F. [4 ]
机构：
[1] Kocaeli Univ, Electroopt & Sys Eng Umuttepe, TR-41380 Kocaeli, Turkey
[2] Kocaeli Univ, LATARUM Lab, TR-41275 Yenikoy Kocaeli, Turkey
[3] Kocaeli Univ, Hereke MYO, TR-41800 Hereke Kocaeli, Turkey
[4] Marmara Univ, Dept Phys, TR-34722 Istanbul, Turkey
来源：
ACTA PHYSICA POLONICA A | 2014年 / 125卷 / 02期
关键词：
GAS SENSOR; PALLADIUM;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In this study, methanol vapor sensing of porous silicon was investigated. The porous silicon samples were anodized in HF based solution and rinsed with ethanol or deionized water after the anodisation. Porous silicon surface is very sensitive for methanol vapor sensing and the sensitivity affect from the rinsing procedure of porous silicon. The experimental results show that porous silicon is a promising candidate material for sensing methanol vapor.
引用
收藏
页码：288 / 289
页数：2
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