Influence of Cu Content on the Structure and Properties of Zr-Cu-N Films Deposited by PBAIP

被引：0
|
作者：
Zhang Lin [1 ,2 ]
Lin Guoqiang [1 ]
Ma Guojia [1 ,2 ]
Wei Keke [1 ]
机构：
[1] Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
[2] Beijing Aeronaut Mfg Technol Res Inst, Sci & Technol Power Beam Proc Lab, Beijing 100024, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2013年 / 42卷
关键词：
Zr-Cu-N film; structure; mechanical properties; arc ion plating; SUPERHARD NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; HARD; ARC; BIAS; DC;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A series of Zr-Cu-N composite films were deposited using a pulsed bias arc ion plating system. The composition, structure, mechanical and tribological properties of the films were investigated by electron probe micro-analyzer (EPMA), X-ray diffraction (XRD), nano-indentation and reciprocating sliding wear tests, respectively. The results show that the structure of Zr-Cu-N films strongly depends on the Cu contents. Cu plays an important role as soft metal phase to refine grain size of ZrN crystallite during the film growth. The hardness and modulus decrease with increasing Cu content, reaching the maximum value of 35.5 and 390.6 GPa, respectively. The friction coefficient of films first increases and then decreases with increasing Cu content.
引用
收藏
页码：87 / 90
页数：4
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