Influence of Cu Content on the Structure and Properties of Zr-Cu-N Films Deposited by PBAIP

被引：0
|
作者：
Zhang Lin [1 ,2 ]
Lin Guoqiang [1 ]
Ma Guojia [1 ,2 ]
Wei Keke [1 ]
机构：
[1] Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
[2] Beijing Aeronaut Mfg Technol Res Inst, Sci & Technol Power Beam Proc Lab, Beijing 100024, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2013年 / 42卷
关键词：
Zr-Cu-N film; structure; mechanical properties; arc ion plating; SUPERHARD NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; HARD; ARC; BIAS; DC;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A series of Zr-Cu-N composite films were deposited using a pulsed bias arc ion plating system. The composition, structure, mechanical and tribological properties of the films were investigated by electron probe micro-analyzer (EPMA), X-ray diffraction (XRD), nano-indentation and reciprocating sliding wear tests, respectively. The results show that the structure of Zr-Cu-N films strongly depends on the Cu contents. Cu plays an important role as soft metal phase to refine grain size of ZrN crystallite during the film growth. The hardness and modulus decrease with increasing Cu content, reaching the maximum value of 35.5 and 390.6 GPa, respectively. The friction coefficient of films first increases and then decreases with increasing Cu content.
引用
收藏
页码：87 / 90
页数：4
相关论文
共 50 条
  • [1] Structure and properties of hard and superhard Zr-Cu-N nanocomposite coatings
    Zeman, P
    Cerstvy, R
    Mayrhofer, PH
    Mitterer, C
    Musil, J
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2000, 289 (1-2): : 189 - 197
  • [2] Flexible antibacterial Zr-Cu-N thin films resistant to cracking
    Musil, Jindrich
    Zitek, Michal
    Fajfrlik, Karel
    Cerstvy, Radomir
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2016, 34 (02):
  • [3] Influence of Cu content on the structure, mechanical and tribological properties of W2N-Cu films
    Yu, Lihua
    Zhao, Hongjian
    Ju, Hongbo
    Xu, Junhua
    [J]. THIN SOLID FILMS, 2017, 624 : 144 - 151
  • [4] Influence of Cu content on the phase composition and thermoelectric properties of deposited Cu-Se films
    Li, Guipeng
    Song, Guihong
    Wang, Nan
    Hu, Fang
    Wu, Yusheng
    Du, Hao
    Yuo, Junhua
    [J]. SURFACES AND INTERFACES, 2022, 28
  • [5] Influence of Cu Content on the Structure, Mechanical, Friction andWear Properties of VCN-Cu Films
    Wu, Fanjing
    Yu, Lihua
    Ju, Hongbo
    Xu, Junhua
    Shi, Ji
    [J]. COATINGS, 2018, 8 (03):
  • [6] Morphology and microstructure of hard and superhard Zr-Cu-N natiocomposite coatings
    Musil, J
    Vlcek, J
    Zeman, P
    Setsuhara, Y
    Miyake, S
    Konuma, S
    Kumagai, M
    Mitterer, C
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (11A): : 6529 - 6533
  • [7] Morphology and microstructure of hard and superhard Zr-Cu-N nanocomposite coatings
    Musil, Jindrich
    Vlcek, Jaroslav
    Zeman, Petr
    Setsuhara, Yuichi
    Miyake, Shoji
    Konuma, Seiji
    Kumagai, Masao
    Mitterer, Christian
    [J]. Musil, J., 1600, Japan Society of Applied Physics (41): : 6529 - 6533
  • [8] Structure and mechanical properties of magnetron sputtered Zr-Ti-Cu-N films
    Musil, J
    Daniel, R
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 166 (2-3): : 243 - 253
  • [9] Influence of Co:Cu ratio on properties of Co-Cu films deposited at different conditions
    Karaagac, Oznur
    Kockar, Hakan
    Alper, Mursel
    Haciismailoglu, Murside
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2012, 324 (22) : 3834 - 3838
  • [10] Influence of Cu Content on the Microstructure, Mechanical, and Tribological Properties of ZrN-Cu Films
    Chen, Tong
    Yu, Lihua
    Ju, Hongbo
    Xu, Junhua
    Koyama, Shinji
    [J]. NANO, 2018, 13 (04)
12345