Microfabrication of microdevices by electroless deposition

被引：0
|
作者：
Khoperia, TN [1 ]
机构：
[1] Georgian Acad Sci, Inst Phys, GE-380077 Tbilisi, Georgia
来源：
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION AND SEMICONDUCTOR/METAL DEPOSITION II, PROCEEDINGS | 1999年 / 99卷 / 09期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：352 / 360
页数：9
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