Fabrication of nanoscale magnetic ring structures and devices

被引:26
|
作者
Heyderman, LJ [1 ]
Kläui, M
Nöhammer, B
Vaz, CAF
Bland, JAC
David, C
机构
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
[2] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England
关键词
electron beam lithography; patterned magnetic rings; magneto-optical Kerr effect; magnetoresistance;
D O I
10.1016/j.mee.2004.03.051
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have fabricated nanoscale ferromagnetic rings and radially contacted magnetic ring structures using electron beam lithography with a lift-off process for pattern transfer. The resist thickness and electron beam dose were optimised to produce 10 nm-thick permalloy rings with linewidths of 30 nm and outer diameters down to 90 nm. Magneto-optical Kerr effect measurements show that down to the smallest diameters, reproducible magnetic switching into the flux-closure vortex state is maintained. For the radially contacted ring devices, magnetic rings with linewidths of 100 and 200 nm (outer diameters of 1.1 and 1.2 mum) were produced and aluminium contacts added using an electron beam writer overlay procedure. The position of domain walls could be determined by measuring the magnetoresistance between different contacts and so the details of the magnetic switching could be ascertained. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:780 / 784
页数:5
相关论文
共 50 条
  • [21] A benchtop method for the fabrication and patterning of nanoscale structures on polymers
    Helt, JM
    Drain, CM
    Batteas, JD
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2004, 126 (02) : 628 - 634
  • [22] Fabrication of nanoscale structures of InGaN by MOCVD lateral overgrowth
    Wang, J
    Nozaki, M
    Ishikawa, Y
    Hao, MS
    Morishima, Y
    Wang, T
    Naoi, Y
    Sakai, S
    JOURNAL OF CRYSTAL GROWTH, 1999, 197 (1-2) : 48 - 53
  • [23] Fabrication of microbowtie structures for optical probing of nanoscale objects
    A. A. Tseng
    R. E. Diaz
    C. D. Chen
    C. S. Wu
    Microsystem Technologies, 2003, 9 (5) : 335 - 339
  • [24] Fabrication of nanoscale heterostructure devices with a focused ion beam microscope
    Bell, C
    Burnell, G
    Kang, DJ
    Hadfield, RH
    Kappers, MJ
    Blamire, MG
    NANOTECHNOLOGY, 2003, 14 (06) : 630 - 632
  • [25] Design and fabrication of memory devices based on nanoscale polyoxometalate clusters
    Christoph Busche
    Laia Vilà-Nadal
    Jun Yan
    Haralampos N. Miras
    De-Liang Long
    Vihar P. Georgiev
    Asen Asenov
    Rasmus H. Pedersen
    Nikolaj Gadegaard
    Muhammad M. Mirza
    Douglas J. Paul
    Josep M. Poblet
    Leroy Cronin
    Nature, 2014, 515 : 545 - 549
  • [26] Design and fabrication of colloid-based vertical nanoscale devices
    Parker, AJ
    Childs, PA
    Palmer, RE
    MICROELECTRONIC ENGINEERING, 2002, 61-2 : 681 - 686
  • [27] Design and fabrication of memory devices based on nanoscale polyoxometalate clusters
    Busche, Christoph
    Vila-Nadal, Laia
    Yan, Jun
    Miras, Haralampos N.
    Long, De-Liang
    Georgiev, Vihar P.
    Asenov, Asen
    Pedersen, Rasmus H.
    Gadegaard, Nikolaj
    Mirza, Muhammad M.
    Paul, Douglas J.
    Poblet, Josep M.
    Cronin, Leroy
    NATURE, 2014, 515 (7528) : 545 - 549
  • [28] Controlled placement of nanoscale building blocks: Toward large-scale fabrication of nanoscale devices
    Koh, Seong Jin
    JOM, 2007, 59 (03) : 22 - 28
  • [29] Controlled placement of nanoscale building blocks: Toward large-scale fabrication of nanoscale devices
    Seong Jin Koh
    JOM, 2007, 59 : 22 - 28
  • [30] Fabrication and Reliability Analysis of Nanoscale Magnetic Tunnel Junctions
    Wang, Yubo
    Zhao, Dongyan
    Chen, Yanning
    Fu, Zhen
    Zhang, Haifeng
    Zhou, Zhimei
    Wan, Yong
    Pan, Cheng
    Liu, Fang
    Yuan, Yuandong
    Cao, Kaihua
    SPIN, 2021, 11 (01)