Islanding, growth mode and ordering in Si heteroepitaxy on Ge(001) substrates structured by thermal annealing

被引:2
|
作者
Persichetti, L. [1 ]
Fanfoni, M. [2 ]
Bonanni, B. [2 ]
De Seta, M. [1 ]
Di Gaspare, L. [1 ]
Goletti, C. [2 ]
Ottaviano, L. [3 ]
Sgarlata, A. [2 ]
机构
[1] Univ Roma Tre, Dipartimento Sci, Viale G Marconi 446, I-00146 Rome, Italy
[2] Univ Roma Tor Vergata, Dipartimento Fis, Via Ric Sci 1, I-00133 Rome, Italy
[3] Univ Aquila, Dipartimento Sci Fis & Chim, Laquila, Italy
关键词
Silicon; Germanium; Semiconductors; Group IV epitaxy; Epitaxial growth; SCANNING-TUNNELING-MICROSCOPY; GE ISLANDS; SI(001); SURFACES; DIMERS;
D O I
10.1016/j.susc.2019.02.002
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Si/Ge heteroepitaxial dots under tensile strain are grown on nanostructured Ge substrates produced by high-temperature flash heating exploiting the spontaneous faceting of the Ge(001) surface close to the onset of surface melting. A very diverse growth mode is obtained depending on the specific atomic structure and step density of nearby surface domains with different vicinal crystallographic orientations. On highly-miscut areas of the Ge (001) substrate, the critical thickness for islanding is lowered to about 5 ML, in contrast to the 11 ML reported for the flat Ge(001) surface, while on unreconstructed (1 x 1) domains the growth is Volmer-Weber driven. An explanation is proposed considering the diverse relative contributions of step and surface energies on misoriented substrates. In addition, we show that the bottom-up pattern of the substrate naturally formed by thermal annealing determines a spatial correlation for the dot sites.
引用
收藏
页码:31 / 37
页数:7
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