Nanostructured thin film coatings with different strengthening effects

被引：0
|
作者：
Panfilov, Yury [1 ]
机构：
[1] MSTU, Elect Technol Machinery Chair, 2-D Baumanskay St,5, Moscow 105005, Russia
来源：
INTERNATIONAL CONFERENCE ON MODERN TRENDS IN MANUFACTURING TECHNOLOGIES AND EQUIPMENT (ICMTMTE 2017) | 2017年 / 129卷
关键词：
D O I：
10.1051/matecconf/201712902019
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A number of articles on strengthening thin film coatings were analyzed and a lot of unusual strengthening effects, such as super high hardness and plasticity simultaneously, ultra low friction coefficient, high wear-resistance, curve rigidity increasing of drills with small diameter, associated with process formation of nanostructured coatings by the different thin film deposition methods were detected. Vacuum coater with RF magnetron sputtering system and ion-beam source and arc evaporator for nanostructured thin film coating manufacture are represented. Diamond Like Carbon and MoS2 thin film coatings, Ti, Al, Nb, Cr, nitride, carbide, and carbo-nitride thin film materials are described as strengthening coatings.
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页数：4
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