DESIGN OF MEMS PRESURE SENSOR FOR ENVIRONMENTAL APPLICATIONS

被引：0
|
作者：
Ashish [1 ]
Shanmuganantham, T. [1 ]
机构：
[1] Pondicherry Univ, Dept Elect Engn, Pondicherry, India
来源：
2014 INTERNATIONAL CONFERENCE ON COMPUTER COMMUNICATION AND INFORMATICS (ICCCI) | 2014年
关键词：
MEMS; Micro Sensor; Diaphragm; Piezoresistor Displacement;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this paper, the design and analysis of diaphragm based Micro-Electro-Mechanical Systems (MEMS) sensor for environmental applications is presented. Performance parameters like the maximum induced stress, deflection and sensitivity of the diaphragms have been compared using the INTELLISUITE software. In order to increase the sensitivity of pressure sensor, the membrane needs to be either thin or large to achieve good results. But there is tradeoff between stability, linearity and sensitivity. If membrane is thinner, the sensor structure is more unstable. With change in dimension and sensing material, better sensitivity can be observed.
引用
收藏
页数：3
相关论文
共 50 条
  • [41] Design and Analysis of a Novel MEMS Touch Mode Convex Capacitive Pressure Sensor for Altimeter Applications
    Sreekanth, P. K.
    Jindal, Sumit Kumar
    NANO, 2022, 17 (14)
  • [42] Design and performance evaluation of smart vibration sensor for industrial applications with built-in MEMS accelerometers
    Dosedel, Martin
    Havranek, Zdenek
    PROCEEDINGS OF THE 2018 18TH INTERNATIONAL CONFERENCE ON MECHATRONICS - MECHATRONIKA (ME), 2018, : 22 - 29
  • [43] Multiobjective optimal design of MEMS-based reconfigurable and evolvable sensor networks for space applications
    Yang, Erfu
    Haridas, Nakul
    El-Rayis, A.
    Erdogan, A. T.
    Arslan, Tughrul
    Barton, Nick
    NASA/ESA CONFERENCE ON ADAPTIVE HARDWARE AND SYSTEMS, PROCEEDINGS, 2007, : 27 - +
  • [44] Design of MMFCS for MAV Based on MEMS Sensor
    Xiong Wei
    Zhou Zhao-Ying
    Liu Xiaoyan
    MEMS/NEMS NANO TECHNOLOGY, 2011, 483 : 542 - +
  • [45] Design of Piezoresistive MEMS Absolute Pressure Sensor
    Kumar, S. Santosh
    Pant, B. D.
    16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES, 2012, 8549
  • [46] Design for Package Miniaturization for a MEMS Pressure Sensor
    Duca, Roseanne
    Ghidoni, Marco Omar
    2019 20TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2019,
  • [47] Design of a Wind Speed Sensor based on MEMS
    Zhou, You
    2019 4TH INTERNATIONAL CONFERENCE ON MECHANICAL, CONTROL AND COMPUTER ENGINEERING (ICMCCE 2019), 2019, : 487 - 492
  • [48] Design and simulation of MEMS based humidity sensor
    Zachariah, Alex C.
    Govardhan, K.
    2005 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS, VOLS 1-5, 2005, : 1363 - 1366
  • [49] Design of a MEMS Sensor to Detect the Casimir Force
    Yamarthy, Chakravarthy
    McNamara, Shamus
    2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 645 - 648
  • [50] Streamlining the Design of MEMS Devices: An Acceleration Sensor
    Tran Duc Tan
    Roy, Sebastien
    Nguyen Phu Thuy
    Huu Tue Huynh
    IEEE CIRCUITS AND SYSTEMS MAGAZINE, 2008, 8 (01) : 18 - 27
12345