Macro-modeling of systems including free-space optical MEMS

One barrier to the integration of MEMS devices into optical systems is the lack of a system-level CAD tool allowing the optimization of MOEMS designs simultaneously with embedding control electronics. Our work addresses this issue by integrating extracted electromechanical macro-models for MEMS devices and optical macro-models based on Gaussian beam optics into a system-level simulation tool. Microcosm's MEMCAD includes MEMSys, a Saber based package used to simulate and analyze mixed electrical, mechanical, and fluidic systems. We have added an optical domain to this framework. In this paper, we introduce this optical system-level modeling concept in both theory and through the simulation of an optical MEMS noise suppression system.