Defect-Free Dicing for Higher Device Reliability

被引：0
|
作者：
Johnston, Christopher [1 ]
Piallat, Fabien [2 ]
机构：
[1] Adv Vacuum, Lomma, Sweden
[2] Plasma Therm, Bernin, France
来源：
2018 7TH ELECTRONIC SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE (ESTC) | 2018年
关键词：
dicing; plasma dicing; singulation; stress relief; die strength; advanced packaging; dicing quality; die chipping; silicon damage; blade dicing; laser dicing; stealth dicing; delamination; street width; die spacing; round corners; round edges; die shapes; non-orthogonal; etch profile; BOSCH process; DRIE; RIE dicing tape; UV tape; high selectivity; crack stop; mechanical stress; thermal stress; sidewall roughness; profile control; die profile; low temperature etching; gentle etching; exposed metals; exposed bumps; exposed pads; round die; hexagon die; test keys; TEG; PCM;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：4
相关论文
共 50 条
  • [1] Defect-free thin films
    不详
    MATERIALS TECHNOLOGY, 2010, 25 (01) : 1 - 2
  • [2] Processing Defect-free graphene
    King, Anthony
    CHEMISTRY & INDUSTRY, 2014, 78 (05) : 7 - 7
  • [3] ASSESSING THE DEFECT-FREE STRUCTURE
    GOODALL, IW
    GOODMAN, AM
    NUCLEAR ENGINEERING AND DESIGN, 1995, 153 (2-3) : 331 - 341
  • [4] Defect-Free Junction TFT for improving reliability under hot carrier stress
    Jung, Sang-Hoon
    Shin, Hee-Sun
    Han, Min-Koo
    PHYSICA SCRIPTA, 2004, T114 : 127 - 129
  • [5] Toward Defect-Free Nanoimprinting
    Guan, Tianyu
    Huang, Ning
    Song, Rijian
    Mao, Tianyu
    Jagannath, Akshaya
    Wang, Wenxin
    Fang, Fengzhou
    Zhang, Nan
    SMALL, 2024, 20 (42)
  • [6] IC inspection for defect-free connections
    Jacob, G
    EE-EVALUATION ENGINEERING, 1997, 36 (09): : 28 - 30
  • [7] IMPROVED SEMICONDUCTOR DEVICE RELIABILITY FROM PLASMA DICING
    Barnett, R.
    Hopkins, Janet
    Fulton, Stewart
    Ansell, Oliver
    Kazemi, Samira
    Day, Matthew
    2019 INTERNATIONAL WAFER LEVEL PACKAGING CONFERENCE (IWLPC), 2019,
  • [8] Defect-Free Carbon Nanotube Coils
    Shadmi, Nitzan
    Kremen, Anna
    Frenkel, Yiftach
    Lapin, Zachary J.
    Machado, Leonardo D.
    Legoas, Sergio B.
    Bitton, Ora
    Rechav, Katya
    Popovitz-Biro, Ronit
    Galvao, Douglas S.
    Jorio, Ado
    Novotny, Lukas
    Kalisky, Beena
    Joselevich, Ernesto
    NANO LETTERS, 2016, 16 (04) : 2152 - 2158
  • [9] Defect-free diamond grinding of ferrites
    Burlachenko O.V.
    Pushkarev D.O.
    Kiseleva M.N.
    Russ. Eng. Res., 2012, 3 (299-300): : 299 - 300
  • [10] Growth of defect-free GaP nanowires
    Husanu, Elena
    Ercolani, Daniele
    Gemmi, Mauro
    Sorba, Lucia
    NANOTECHNOLOGY, 2014, 25 (20)
12345