Charging potential of dielectrics and insulated conductors as a function of the angle of incidence of an electron beam

被引:0
|
作者
Evstaf'eva, E. N. [1 ]
Zaitsev, S. V. [1 ]
Rau, E. I. [1 ,2 ]
Tatarintsev, A. A. [2 ]
机构
[1] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia
[2] Russian Acad Sci, Inst Microelect Technol & High Purity Mat, Chernogolovka 142452, Moscow Oblast, Russia
关键词
charging of dielectrics; secondary electrons; surface potential; potential; angle of incidence of electron beam; electron emission; SECONDARY; EMISSION;
D O I
10.3103/S0027134914010056
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The cardinal characteristics of the charging of dielectric and ungrounded metal targets within radiation by medium-energy electrons (0.5-10 keV) have been studied theoretically and experimentally as a function of the angle of incidence of the electron beam. The coefficients of electron emissions and the second critical energy of primary (radiating) electrons, E (2C) , have been determined as a function of the angle of incidence alpha when the targets are not being charged.
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页码:61 / 65
页数:5
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