Evaluation of TEM methods for their signature of the number of layers in mono- and few-layer TMDs as exemplified by MoS2 and MoTe2

被引：5

作者：

Koester, Janis ^{[1
]}

Storm, Alexander ^{[1
]}

Gorelik, Tatiana E. ^{[1
]}

Mohn, Michael J. ^{[1
]}

Port, Fabian ^{[2
]}

Goncalves, Manuel R. ^{[2
]}

Kaiser, Ute ^{[1
]}

机构：

[1] Ulm Univ, Electron Microscopy Grp Mat Sci EMMS, Cent Facil Electron Microscopy, Albert Einstein Allee 11, D-89081 Ulm, Germany

[2] Ulm Univ, Inst Expt Phys, Ulm, Baden Wuerttemb, Germany

来源：

MICRON | 2022年 / 160卷

关键词：

2D materials; HRTEM; Plasmon dispersion; Momentum-resolved EELS (MR-EELS); 3D electron diffraction (3D ED); Ab-initio calculations; MoS2; MoTe2; SPECIMEN-THICKNESS MEASUREMENT; CRYSTAL-STRUCTURE; SINGLE-LAYER; GRAPHENE; TRANSMISSION; MONOLAYER; ENERGY; DISPERSION; PLASMON; EELS;

D O I：

10.1016/j.micron.2022.103303

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

In mono- and few-layer 2D materials, the exact number of layers is a critical parameter, determining the materials' properties and thus their performance in future nano-devices. Here, we evaluate in a systematic manner the signature of exfoliated free-standing mono-and few-layer MoS2 and MoTe2 in TEM experiments such as high resolution transmission electron microscopy, electron energy-loss spectroscopy, and 3D electron diffraction. A reference for the number of layers has been determined by optical contrast and AFM measurements on a substrate. Comparing the results, we discuss strengths and limitations, benchmarking the three TEM methods with respect to their ability to identify the exact number of layers.

引用

页数：13

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