共 50 条
- [23] Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode SURFACE & COATINGS TECHNOLOGY, 2017, 314 : 97 - 104
- [24] Phase Tailoring of Tantalum Thin Films Deposited in Deep Oscillation Magnetron Sputtering Mode SOCIETY OF VACUUM COATERS 59TH ANNUAL TECHNICAL CONFERENCE PROCEEDINGS, 2016, 2016, : 146 - 154
- [26] Reactive sputter deposition and characterization of tantalum nitride thin films Materials Science & Engineering B: Solid-State Materials for Advanced Technology, 1999, B57 (03): : 224 - 227
- [27] Reactive sputter deposition and characterization of tantalum nitride thin films MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 57 (03): : 224 - 227
- [28] High frequency response of amorphous tantalum oxide thin films IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, 2001, 24 (03): : 526 - 533