Piezoelectric AlGaAs bimorph microactuators

被引：12
|
作者：
Li, L. [1 ]
Kumar, P.
Kanakraju, S.
DeVoe, D. L.
机构：
[1] Univ Maryland, College Pk, MD 20742 USA
[2] Lab Phys Sci, College Pk, MD 20740 USA
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2006年 / 16卷 / 05期
关键词：
D O I：
10.1088/0960-1317/16/5/026
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Piezoelectric bimorph cantilever microactuators based on single-crystal Al0.3Ga0.7As are demonstrated. Fabricated devices are characterized for their quasistatic and resonant behavior when driven in both unimorph and bimorph configurations. Quasistatic actuator behavior is compared with a simple analytic model. Measured unimorph and bimorph tip deflections match well with the model, with deviations resulting from imperfections in device geometry and electrical resistivity of the electrodes. The effects of bimorph actuation on linearity and structural damping at resonance are also evaluated.
引用
收藏
页码：1062 / 1066
页数：5
相关论文
共 50 条
  • [21] A piezoelectric pseudo-bimorph actuator
    Shi, Huaduo
    Chen, Jianguo
    Liu, Guoxi
    Xiao, Wenlei
    Dong, Shuxiang
    APPLIED PHYSICS LETTERS, 2013, 102 (24)
  • [22] Resonance magnetoelectric effects in a piezoelectric bimorph
    Fetisov, Y. K.
    Chashin, D. V.
    Segalla, A. G.
    Srinivasan, G.
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (06)
  • [23] A PIEZOELECTRIC BIMORPH STATIC PRESSURE SENSOR
    CALIANO, G
    LAMBERTI, N
    IULA, A
    PAPPALARDO, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) : 176 - 178
  • [24] Performance analysis of piezoelectric bimorph generator
    Kan J.
    Tang K.
    Zhao H.
    Shao C.
    Zhu G.
    Frontiers of Mechanical Engineering in China, 2008, 3 (2): : 151 - 157
  • [25] Analytical and numerical approaches to piezoelectric bimorph
    Fernandes, A
    Pouget, J
    INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2003, 40 (17) : 4331 - 4352
  • [26] Traveling machine driven by piezoelectric bimorph
    Hua, Shunming
    Cheng, Guangming
    Fan, Zunqiang
    Yang, Zhigang
    Suzuki, Katsiyoshi
    Chinese Journal of Mechanical Engineering (English Edition), 2007, 20 (02): : 73 - 76
  • [27] Analysis of a ceramic bimorph piezoelectric gyroscope
    Yang, JS
    Fang, HY
    Jiang, Q
    INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS, 1999, 10 (06) : 459 - 473
  • [28] Optimal materials selection for bimaterial piezoelectric microactuators
    Srinivasan, Prasanna
    Spearing, S. Mark
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 17 (02) : 462 - 472
  • [29] A PIEZOELECTRIC SLIDER COMPOSED OF BIMORPH VIBRATORS
    FUKAMI, T
    SHIMOE, K
    KAWAGUCHI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 : 193 - 195
  • [30] Modeling and analysis of a bimorph piezoelectric cantilever
    Guo, Lei
    Qin, Yi
    2016 13TH INTERNATIONAL CONFERENCE ON UBIQUITOUS ROBOTS AND AMBIENT INTELLIGENCE (URAI), 2016, : 248 - 251
12345