Recent progress in integration of III-V nanowire transistors on Si substrate by selective-area growth

被引:36
|
作者
Tomioka, Katsuhiro [1 ,2 ,3 ]
Fukui, Takashi [1 ,2 ]
机构
[1] Hokkaido Univ, Grad Sch Informat Sci Technol, Sapporo, Hokkaido 0600814, Japan
[2] Hokkaido Univ, Res Ctr Integrated Quantum Elect, Sapporo, Hokkaido 0608628, Japan
[3] Japan Sci & Technol Agcy, PRESTO, Kawaguchi, Saitama 3320012, Japan
基金
日本科学技术振兴机构;
关键词
III-V nanowires; epitaxy; FET; tunnel FET; CORE-SHELL NANOWIRES; MOLECULAR-BEAM EPITAXY; SELF-CATALYZED GAAS; WRAP-GATE TRANSISTORS; OPTICAL-PROPERTIES; INAS NANOWIRES; SOLAR-CELLS; HETEROGENEOUS INTEGRATION; NANOIMPRINT LITHOGRAPHY; SILICON SUBSTRATE;
D O I
10.1088/0022-3727/47/39/394001
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the recent progress in electronic applications using III-V nanowires (NWs) on Si substrates using the selective-area growth method. This method could align vertical III-V NWs on Si under specific growth conditions. Detailed studies of the III-V NW/Si heterointerface showed the possibility of achieving coherent growth regardless of misfit dislocations in the III-V/Si heterojunction. The vertical III-V NWs grown using selective-area growth were utilized for high performance vertical field-effect transistors (FETs). Furthermore, III-V NW/Si heterointerfaces with fewer misfit dislocations provided us with a unique band discontinuity with a new functionality that can be used for the application of tunnel diodes and tunnel FETs. These demonstrations could open the door to a new approach for creating low power switches using III-V NWs as building-blocks of future nanometre-scaled electronic circuits on Si platforms.
引用
收藏
页数:13
相关论文
共 50 条
  • [31] Vertical III-V Nanowire-Channel on Si
    Tomioka, Katsuhiro
    Fukui, Takashi
    SEMICONDUCTORS, DIELECTRICS, AND METALS FOR NANOELECTRONICS 11, 2013, 58 (07): : 99 - 114
  • [32] Effect of confinement in III-V nanowire field effect transistors
    Price, A.
    Martinez, A.
    18TH INTERNATIONAL WORKSHOP ON COMPUTATIONAL ELECTRONICS (IWCE 2015), 2015,
  • [33] Analytical Gate Capacitance Modeling of III-V Nanowire Transistors
    Marin, Enrique G.
    Garcia Ruiz, Francisco J.
    Maria Tienda-Luna, Isabel
    Godoy, Andres
    Gamiz, Francisco
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (05) : 1590 - 1599
  • [34] Position-Controlled III-V Compound Semiconductor Nanowire Solar Cells by Selective-Area Metal-Organic Vapor Phase Epitaxy
    Fukui, Takashi
    Yoshimura, Masatoshi
    Nakai, Eiji
    Tomioka, Katsuhiro
    AMBIO, 2012, 41 : 119 - 124
  • [35] Heterogeneous III-V / Si Photonic Integration
    Bowers, John E.
    2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2016,
  • [36] III-V selective area growth and epitaxial functional oxides on Si: from Electronic to Photonic devices
    Merckling, C.
    Liu, Z.
    Hsu, M.
    Hasan, S.
    Jiang, S.
    El-Kazzi, S.
    Boccardi, G.
    Waldron, N.
    Wang, Z.
    Tian, B.
    Pantouvaki, M.
    Van Campenhout, J.
    Collaert, N.
    Heyns, M.
    Van Thourhout, D.
    Vandervorst, W.
    Thean, A.
    DIELECTRICS FOR NANOSYSTEMS 7: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING, 2016, 72 (02): : 59 - 69
  • [37] TUNGSTEN PATTERNING AS A TECHNIQUE FOR SELECTIVE AREA III-V MBE GROWTH
    HARBISON, JP
    DERKITS, GE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02): : 743 - 745
  • [38] Orientation-Controlled Selective-Area Epitaxy of III-V Nanowires on (001) Silicon for Silicon Photonics
    Chang, Ting-Yuan
    Kim, Hyunseok
    Zutter, Brian T.
    Lee, Wook-Jae
    Regan, Brian C.
    Huffaker, Diana L.
    ADVANCED FUNCTIONAL MATERIALS, 2020, 30 (30)
  • [39] III-V nanowire growth mechanism: V/III ratio and temperature effects
    Dayeh, Shadi A.
    Yu, Edward T.
    Wang, Deli
    NANO LETTERS, 2007, 7 (08) : 2486 - 2490
  • [40] Advances in the theory of III-V nanowire growth dynamics
    Krogstrup, Peter
    Jorgensen, Henrik I.
    Johnson, Erik
    Madsen, Morten Hannibal
    Sorensen, Claus B.
    Fontcuberta i Morral, Anna
    Aagesen, Martin
    Nygard, Jesper
    Glas, Frank
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2013, 46 (31)