Recent progress in integration of III-V nanowire transistors on Si substrate by selective-area growth

被引:36
|
作者
Tomioka, Katsuhiro [1 ,2 ,3 ]
Fukui, Takashi [1 ,2 ]
机构
[1] Hokkaido Univ, Grad Sch Informat Sci Technol, Sapporo, Hokkaido 0600814, Japan
[2] Hokkaido Univ, Res Ctr Integrated Quantum Elect, Sapporo, Hokkaido 0608628, Japan
[3] Japan Sci & Technol Agcy, PRESTO, Kawaguchi, Saitama 3320012, Japan
基金
日本科学技术振兴机构;
关键词
III-V nanowires; epitaxy; FET; tunnel FET; CORE-SHELL NANOWIRES; MOLECULAR-BEAM EPITAXY; SELF-CATALYZED GAAS; WRAP-GATE TRANSISTORS; OPTICAL-PROPERTIES; INAS NANOWIRES; SOLAR-CELLS; HETEROGENEOUS INTEGRATION; NANOIMPRINT LITHOGRAPHY; SILICON SUBSTRATE;
D O I
10.1088/0022-3727/47/39/394001
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the recent progress in electronic applications using III-V nanowires (NWs) on Si substrates using the selective-area growth method. This method could align vertical III-V NWs on Si under specific growth conditions. Detailed studies of the III-V NW/Si heterointerface showed the possibility of achieving coherent growth regardless of misfit dislocations in the III-V/Si heterojunction. The vertical III-V NWs grown using selective-area growth were utilized for high performance vertical field-effect transistors (FETs). Furthermore, III-V NW/Si heterointerfaces with fewer misfit dislocations provided us with a unique band discontinuity with a new functionality that can be used for the application of tunnel diodes and tunnel FETs. These demonstrations could open the door to a new approach for creating low power switches using III-V NWs as building-blocks of future nanometre-scaled electronic circuits on Si platforms.
引用
收藏
页数:13
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