Development of Pressure Sensitive Molecular Film as a Measurement Technique for Micro-Flows

The pressure-sensitive paint (PSP) has potential as a diagnostic tool for pressure measurement in the high Knudsen number regime because it works as a so-called "molecular sensor". However, there arc few reports concerning application of the PSP to micro devices, because the conventional PSP is too thick owing to the use of polymer binder. In our previous work, we have adopted Langmuir-Blodgett (LB) technique to fabricate pressure sensitive molecular films (PSMFs) using Pd(II) Mesoporphyrin IX (PdMP). The PSMF based on PdMP has pressure sensitivity only at low pressure range (below 3kPa). In this study, we have constructed PSMF composed of Pt(II) Mesoporphyrin IX (PtMP) to be applied to pressure measurement near atmospheric pressure. The pressure sensitivity of PSMF based on PIMP has been tested, and it is clarified that the PSMF of PIMP has equivalent pressure sensitivity of polymer PSP. Moreover, we have applied PSMF to measurement of pressure distribution of micro-channel gas flow, showing its usefulness.