flexural modes;
non-contact force microscopy;
oscillation;
D O I:
10.1016/S0169-4332(99)00548-6
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
The oscillation characteristics of higher flexural modes of a rectangular microfabricated silicon cantilever have been studied in ultra-high vacuum (UHV) for a free cantilever and for a typical situation in non-contact force microscopy. The results are discussed with respect to the use of such modes in dynamic force microscopy (DFM) and local dissipation measurements. (C) 2000 Elsevier Science B.V. All rights reserved.