Large Area Surface Ablation and Micropatterning of Transparent Dielectrics with Femtosecond UV Laser Pulses

被引:0
|
作者
Stonyte, Dominyka [1 ]
Jukna, Vytautas [1 ]
Butkus, Simas [1 ]
Paipulas, Domas [1 ]
机构
[1] Vilnius Univ, Fac Phys, Laser Res Ctr, Sauletekio Av 10, LT-10223 Vilnius, Lithuania
关键词
D O I
10.1109/CLEO/Europe-EQEC52157.2021.9542804
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页数:1
相关论文
共 50 条
  • [1] ABLATION OF UV-TRANSPARENT MATERIALS WITH FEMTOSECOND UV EXCIMER LASER-PULSES
    KUPER, S
    STUKE, M
    [J]. LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES, 1989, 129 : 375 - 384
  • [2] The ablation process induced by femtosecond laser in transparent dielectrics
    Li, XX
    Jia, TQ
    Feng, DH
    Xu, ZZ
    [J]. FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 87 - 91
  • [3] Laser ablation mechanism of transparent dielectrics with picosecond laser pulses
    Sun, Mingying
    Eppelt, Urs
    Russ, Simone
    Hartmann, Claudia
    Siebert, Christof
    Zhu, Jianqiang
    Schulz, Wolfgang
    [J]. LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2012, 2012, 8530
  • [4] Laser ablation of dielectrics with temporally shaped femtosecond pulses
    Stoian, R
    Boyle, M
    Thoss, A
    Rosenfeld, A
    Korn, G
    Hertel, IV
    Campbell, EEB
    [J]. APPLIED PHYSICS LETTERS, 2002, 80 (03) : 353 - 355
  • [5] Direct Laser Ablation of Glasses with Low Surface Roughness Using Femtosecond UV Laser Pulses
    Stonyte, Dominyka
    Jukna, Vytautas
    Paipulas, Domas
    [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2022, 17 (02): : 121 - 126
  • [6] Femtosecond laser ablation of transparent dielectrics:: measurement and modelisation of crater profiles
    Guizard, S
    Semerok, A
    Gaudin, J
    Hashida, A
    Martin, P
    Quéré, F
    [J]. APPLIED SURFACE SCIENCE, 2002, 186 (1-4) : 364 - 368
  • [7] Ultrafast laser ablation of dielectrics employing temporally shaped femtosecond pulses
    Stoian, R
    Boyle, M
    Thoss, A
    Rosenfeld, A
    Ashkenasi, D
    Korn, G
    Campbell, EEB
    Hertel, IV
    [J]. SECOND INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2002, 4426 : 78 - 81
  • [8] Ablation of Si and Ge using UV femtosecond laser pulses
    Herbst, G
    Steiner, M
    Marowsky, G
    Matthias, E
    [J]. ADVANCED LASER PROCESSING OF MATERIALS - FUNDAMENTALS AND APPLICATIONS, 1996, 397 : 69 - 74
  • [9] Ciliary white light generated during femtosecond laser ablation on transparent dielectrics
    Liu, Yi
    Brelet, Yohann
    He, Zhanbing
    Yu, Linwei
    Mitryukovskiy, Sergey
    Houard, Aurelien
    Forestier, Benjamin
    Couairon, Arnaud
    Mysyrowicz, Andre
    [J]. 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND INTERNATIONAL QUANTUM ELECTRONICS CONFERENCE (CLEO EUROPE/IQEC), 2013,
  • [10] Spot-size dependence of the ablation threshold in dielectrics for femtosecond laser pulses
    Martin, S
    Hertwig, A
    Lenzner, M
    Krüger, J
    Kautek, W
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (07): : 883 - 884