Laser ablation of dielectrics with temporally shaped femtosecond pulses

被引：173
|
作者：
Stoian, R [2 ]
Boyle, M
Thoss, A
Rosenfeld, A
Korn, G
Hertel, IV
Campbell, EEB
机构：
[1] Natl Inst Laser Plasma & Radiat Phys, Bucharest 76900, Romania
[2] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany
[3] Gothenburg Univ, Dept Expt Phys, S-41296 Gothenburg, Sweden
[4] Chalmers Univ Technol, S-41296 Gothenburg, Sweden
来源：
APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 03期
关键词：
D O I：
10.1063/1.1432747
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process. (C) 2002 American Institute of Physics.
引用
收藏
页码：353 / 355
页数：3
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