Influence of oxygen and nitrogen addition during growth of CVD diamond on pure cobalt substrates

被引:12
|
作者
Neto, M. A. [1 ]
Pereira, E. [1 ]
机构
[1] Univ Aveiro, Dept Phys, P-3810 Aveiro, Portugal
关键词
diamond growth and characterisation; cobalt; morphology; free-standing diamond films;
D O I
10.1016/j.diamond.2005.09.015
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It was shown that in MPCVD reactors the use of common H and CH4 flows, can lead to the formation of free-standing diamond films directly on pure cobalt substrates. The characteristic low adhesion of these films can be explained by the formation of a graphitic layer between the substrate and the film. Scanning electron microscopy analysis shows special areas at the film grain boundaries that were subsequently identified as cobalt inclusions by EDS. In this work we have studied the influence of oxygen and nitrogen addition on the film's growth morphology. Once again SEM and EDS were used to access respectively the films growth morphology and cobalt content. Our results clearly indicate that the addition of oxygen during the initial stages of diamond nucleation prevents diffusion of cobalt into the film. Further, we believed that this effect is likely due to the formation of a cobalt-oxide layer between the film and the substrate. Also, the addition of nitrogen and oxygen the later during nucleation or during growth leads to an increase in the film's growth rate. A preferential (111) surface morphology with clear octahedron facets and films with dominant (100) crystallographic planes are detected. A model is presented for the growth of CVD diamond on cobalt substrates with the addition of oxygen and nitrogen. (c) 2005 Elsevier B.V. All tights reserved.
引用
收藏
页码:465 / 471
页数:7
相关论文
共 50 条
  • [41] Correlation between the OES plasma composition and the diamond film properties during microwave PA-CVD with nitrogen addition
    Vandevelde, T
    Wu, TD
    Quaeyhaegens, C
    Vlekken, J
    D'Olieslaeger, M
    Stals, L
    [J]. THIN SOLID FILMS, 1999, 340 (1-2) : 159 - 163
  • [42] Cobalt diffusion during the initial stage of CVD diamond growth on cemented carbide - A molecular dynamics and experimental study
    Qiao, Yu
    Nie, Siyuan
    Li, Weihan
    Liu, Enzhi
    Wang, Xinchang
    [J]. APPLIED SURFACE SCIENCE, 2023, 633
  • [43] GROWTH AND STRUCTURE OF DIAMOND ON SI SUBSTRATES BY THE HOT-FILAMENT CVD METHOD
    TAMAI, K
    ECHIGOVA, J
    SUTO, H
    [J]. JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1989, 53 (12) : 1214 - 1221
  • [44] Diamond growth during bias pre-treatment in the microwave CVD of diamond
    Stockel, R
    Janischowsky, K
    Rohmfeld, S
    Ristein, J
    Hundhausen, M
    Ley, L
    [J]. DIAMOND AND RELATED MATERIALS, 1996, 5 (3-5) : 321 - 325
  • [45] Investigation of nitrogen addition on hydrogen incorporation in CVD diamond films from polycrystalline to nanocrystalline
    Tang, C. J.
    Abe, I.
    Vieira, L. G.
    Soares, M. J.
    Gracio, J.
    Pinto, J. L.
    [J]. DIAMOND AND RELATED MATERIALS, 2010, 19 (5-6) : 404 - 408
  • [46] Carbon nanotube growth on cobalt-sprayed substrates by then-nal CVD
    Terrado, E.
    Redrado, M.
    Munoz, E.
    Maser, W. K.
    Benito, A. M.
    Martinez, M. T.
    [J]. MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2006, 26 (5-7): : 1185 - 1188
  • [47] Influence of oxygen on the nucleation and growth of diamond films
    GomezAleixandre, C
    Garcia, MM
    Sanchez, O
    Albella, JM
    [J]. THIN SOLID FILMS, 1997, 303 (1-2) : 34 - 38
  • [48] Influence of oxygen and nitrogen on the growth of hot-filament chemical vapor deposited diamond films
    Yu, Z
    Karlsson, U
    Flodström, A
    [J]. THIN SOLID FILMS, 1999, 342 (1-2) : 74 - 82
  • [49] Optical emission spectroscopy of the plasma during microwave CVD of diamond thin films with nitrogen addition and relation to the thin film morphology
    Vandevelde, T
    Nesladek, M
    Quaeyhaegens, C
    Stals, L
    [J]. THIN SOLID FILMS, 1997, 308 : 154 - 158
  • [50] Thermal conductivity of pink CVD diamond: Influence of nitrogen-related centers
    Inyushkin, A. V.
    Taldenkov, A. N.
    Ralchenko, V. G.
    Shu, Guoyang
    Dai, Bing
    Bolshakov, A. P.
    Khomich, A. A.
    Ashkinazi, E. E.
    Boldyrev, K. N.
    Khomich, A. V.
    Han, Jiecai
    Konov, V. I.
    Zhu, Jiaqi
    [J]. JOURNAL OF APPLIED PHYSICS, 2023, 133 (02)