Binary Superimposed Gratings Formed by e-Beam Recording in Amorphous AsS Films

被引：3
|
作者：
Sergeev, S. A. [1 ]
Iovu, M. S. [1 ]
Enachi, M. A. [2 ]
机构：
[1] Inst Appl Phys, MD-2028 Kishinev, Moldova
[2] Natl Ctr Mat Study & Testing, MD-2012 Kishinev, Moldova
来源：
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | 2014年 / 9卷 / 02期
关键词：
e-Beam Recording; Superimposed Gratings; Diffraction Efficiency; Relief Structure; PHOTONIC CRYSTALS; THIN-FILMS; FABRICATION;
D O I：
10.1166/jno.2014.1583
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Binary unidirectional superimposed diffraction gratings with grating periods of 0.9 mu m and 1 mu m were formed in amorphous AsS films by e-beam recording. The influence of recording sequence of index superimposed gratings on their diffraction efficiency was evidenced. Enhancement of diffraction efficiencies of index superimposed gratings as compared to single gratings was revealed. Relief structures of superimposed gratings were fabricated by chemical etching. The surface relief modulation was studied by atomic force microscope. A beat period of 9 mu m for relief complex structure was observed. The highest depth of relief modulation was about 70-80 mu m.
引用
收藏
页码：291 / 294
页数：4
相关论文
共 50 条
  • [21] The structural and electrical properties of samarium doped ceria films formed by e-beam deposition technique
    Virbukas, Darius
    Laukaitis, Giedrius
    SOLID STATE IONICS, 2017, 302 : 107 - 112
  • [22] THE OPTICAL PROPERTIES OF GADOLINIUM DOPED CERIUM OXIDE THIN FILMS FORMED BY E-BEAM TECHNIQUE
    Sriubas, M.
    Laukaitis, G.
    Virbukas, D.
    Klenauskis, S.
    Milcius, D.
    3RD INTERNATIONAL CONFERENCE RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2010, 2010, : 402 - 405
  • [23] Nanostructured alumina films by E-beam evaporation
    Reddy, I. Neelakanta
    Sridhara, N.
    Bera, Parthasarathi
    Anandan, Chinnasamy
    Sharma, Anand Kumar
    Dey, Arjun
    CERAMICS INTERNATIONAL, 2015, 41 (09) : 10537 - 10546
  • [24] Investigation of large area gratings fabricated by ultrafast e-beam writing
    Kley, EB
    Clausnitzer, T
    Cumme, M
    Zöllner, K
    Schnabel, B
    Stich, A
    ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 : 116 - 125
  • [25] The properties of nonstoichiometric lanthanum niobium oxide thin films formed using an e-beam deposition technique
    Bockute, Kristina
    Laukaitis, Giedrius
    Milcius, Darius
    SURFACE & COATINGS TECHNOLOGY, 2013, 214 : 97 - 100
  • [26] E-BEAM INDUCED EPITAXIAL REGROWTH OF AMORPHOUS-SILICON
    GRAF, V
    ONTON, A
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 445 - 445
  • [27] SUPERIMPOSED EQUALLY ORIENTED DIFFRACTION GRATINGS FORMED IN As2S3 FILMS
    Sergeev, S. A.
    Iovu, M. S.
    Meshalkin, A. Yu
    CHALCOGENIDE LETTERS, 2020, 17 (01): : 25 - 31
  • [28] Immersion holographic recording of subwavelength gratings in amorphous chalcogenide thin films
    Teteris, J
    Reinfelde, M
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2005, 7 (05): : 2581 - 2586
  • [29] THIN-FILMS OF YBACUO BY E-BEAM EVAPORATION
    MOOIJ, JE
    VANDERMAREL, D
    APPELBOOM, HM
    SCHELLINGERHOUT, AJG
    VANDELEUR, RHM
    SCHALKOORD, D
    PHYSICA C, 1988, 153 (01): : 771 - 771
  • [30] YSZ thin films deposited by e-beam technique
    Laukaitis, G.
    Dudonis, J.
    Milcius, D.
    THIN SOLID FILMS, 2006, 515 (02) : 678 - 682
12345