Thermodynamical properties of III-V nitrides and crystal growth of GaN at high N-2 pressure

被引:152
|
作者
Porowski, S
Grzegory, I
机构
[1] High Pressure Research Center, Polish Academy of Sciences, 01-142 Warsaw
关键词
GaN; AlN; InN; thermodynamics; solution crystal growth; homoepitaxy;
D O I
10.1016/S0022-0248(97)00072-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper, thermodynamical properties of AlN, GaN and InN are considered. It is shown that significant differences in melting conditions, thermal stability and solubilities in liquid group III metals lead to different possibilities of growing crystals from high temperature solutions, at Na pressure up to 20 kbar. It is shown that the best conditions for crystal growth at available pressure and temperature conditions can be achieved for GaN. High quality 6-10 mm single crystals of GaN have been grown at high N-2 pressure in 60-150 h processes. The mechanisms of nucleation and growth of GaN crystals are discussed on the basis of the experimental results. The crystallization of AlN is less efficient due to relatively low solubility of AlN in liquid Al. Possibility for the growth of InN crystals is strongly limited since this compound loses its stability at T > 600 degrees C, even at 2 GPa N-2 pressure. The crystals of GaN grown at high pressure are the first crystals of this material used for homoepitaxial layer deposition. Both MOCVD and MBE methods have been successfully applied. Structural, electrical and optical properties of both GaN single crystals and homoepitaxial layers are reviewed.
引用
收藏
页码:174 / 188
页数:15
相关论文
共 50 条
  • [11] Growth of III-V nitrides by molecular beam epitaxy
    Moustakas, TD
    GALLIUM NITRIDE (GAN) II, 1999, 57 : 33 - 128
  • [12] GROWTH OF THE III-V NITRIDES - THE ROLE OF THE NITROGEN PLASMA
    ZHU, HB
    BLUMENTHAL, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 284 - PHYS
  • [13] Electron emission properties of diamond and III-V nitrides
    Nemanich, RJ
    Baumann, PK
    Benjamin, MJ
    English, SL
    Hartman, JD
    Sowers, AT
    Ward, BL
    Yang, PC
    MATERIALS ISSUES IN VACUUM MICROELECTRONICS, 1998, 509 : 35 - 46
  • [14] Properties of muonium defect centers in the III-V nitrides
    Lichti, RL
    PHYSICA B-CONDENSED MATTER, 2003, 326 (1-4) : 139 - 144
  • [15] Optical properties and characterization of SiC and III-V nitrides
    Choyke, WJ
    Devaty, RP
    Clemen, LL
    MacMillan, MF
    Yoganathan, M
    SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 257 - 262
  • [16] GAN BASED III-V NITRIDES BY MOLECULAR-BEAM EPITAXY
    MORKOC, H
    BOTCHKAREV, A
    SALVADOR, A
    SVERDLOV, B
    JOURNAL OF CRYSTAL GROWTH, 1995, 150 (1-4) : 887 - 891
  • [17] High temperature surface degradation of III-V nitrides
    Vartuli, CB
    Pearton, SJ
    Abernathy, CR
    MacKenzie, JD
    Lambers, ES
    Zolper, JC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3523 - 3531
  • [18] High temperature surface degradation of III-V nitrides
    Vartuli, C.B.
    Pearton, S.J.
    Abernathy, C.R.
    MacKenzie, J.D.
    Lambers, E.S.
    Zolper, J.C.
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1996, 14 (06):
  • [19] High temperature surface degradation of III-V nitrides
    Vartuli, CB
    Pearton, SJ
    Abernathy, CR
    MacKenzie, JD
    Zolper, JC
    Lambers, ES
    III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 569 - 574
  • [20] High density plasma etching of III-V nitrides
    Vartuli, CB
    Pearton, SJ
    Abernathy, CR
    Shul, RJ
    Howard, AJ
    Kilcoyne, SP
    Parmeter, JE
    HagerottCrawford, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1011 - 1014