Effect of dopants on the fracture toughness of silicon

被引：13

作者：

Swadener, JG ^{[1
]}

Nastasi, M ^{[1
]}

机构：

[1] Los Alamos Natl Lab, Los Alamos, NM 87545 USA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 2002年 / 21卷 / 17期

关键词：

D O I：

10.1023/A:1019772717743

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fracture experiments were conducted on p-type and n-type Si in the presence and absence of hydrogen. It was found that fracture toughness is slightly less than the fracture toughness of n-type silicon. Annealing silicon in an Ar/H2 atmosphere gave a hydrogen concentration of less than 0.1 ppm, which did not have any measurable effect on fracture toughness. Likewise, the exposure of pre-cracked specimens to H2 did not cause any measurable change in fracture toughness.

引用

页码：1363 / 1365

页数：3

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