A multi-channel test system for calibration of MEMS barometric pressure sensors

被引：0

作者：

Lou Wenzhong ^{[1
]}

Ding Xuran ^{[1
]}

Hong Rongsen ^{[1
]}

机构：

[1] Beijing Inst Technol, State Key Lab Mechatron Engn & Control, Beijing, Peoples R China

来源：

2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013) | 2013年

关键词：

calibration of MEMS sensors; multi-channel; test system; Radiosondes;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.

引用

页码：516 / 519

页数：4

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