Study on the fabrication and measurement of polymer/Si arrayed waveguide grating multiplexer

被引：0
|
作者：
Wang, F [1 ]
Zhao, Y [1 ]
Zhang, DM [1 ]
Cui, ZC [1 ]
Yi, MB [1 ]
Liu, SY [1 ]
Sun, W [1 ]
机构：
[1] Jilin Univ Reg, State Key Lab Integrated Optoelect, Changchun 130023, Peoples R China
来源：
APOC 2002: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS; MATERIALS AND DEVICES FOR OPTICAL AND WIRELESS COMMUNICATIONS | 2002年 / 4905卷
关键词：
arrayed waveguide grating; polymer; reaction ion etching; aluminum mask;
D O I：
10.1117/12.480995
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a 9 X 9 Polymer/Si AWG was designed and fabricated. The cladding material is poly-methyl-methacrylate-co-glyciclyl methacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. During the fabrication process of the Polymer/Si AWG device, We used aluminum as mask on polymer instead of conventional photoresist as mask. The results show that the device is good for the wavelength division multiplexing (WDM) system. The output characteristics of the device were measured by a system based on the tapered fiber. The results show that our polymer/Si AWG meets the designed device well.
引用
收藏
页码：139 / 142
页数：4
相关论文
共 50 条
  • [1] Optimization of polymer arrayed waveguide grating multiplexer
    Ma, CS
    Guo, WB
    Zhang, DM
    Chen, KX
    Zhao, Y
    Cui, ZC
    Liu, SY
    [J]. FIBER OPTICS AND OPTOELECTRONICS FOR NETWORK APPLICATIONS, 2001, 4603 : 278 - 282
  • [2] Optimization and fabrication of a polymeric arrayed-waveguide grating multiplexer
    Guo, WB
    Ma, CS
    Chen, WY
    Liu, CX
    Dong, W
    Zhang, DM
    Cui, ZC
    Liu, SY
    [J]. APOC 2002: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS, OPTIAL FIBER AND PLANAR WAVEGUIDE TECHNOLOGY II, 2002, 4904 : 99 - 103
  • [3] An Efficient Design Method of Polymer Arrayed Waveguide Grating Multiplexer
    Yang, Shuo
    Sun, Yong-Xin
    Bayanheshig
    Wang, Yu-Hai
    Qin, Zheng-Kun
    [J]. NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 2015, 7 (02) : 162 - 165
  • [4] Design and Fabrication of Polymer Arrayed Waveguide Grating
    ZHANG Da ming
    [J]. The Journal of China Universities of Posts and Telecommunications, 2003, (02) : 11 - 15
  • [5] Reflective arrayed waveguide grating multiplexer
    de Peralta, LG
    Bernussi, AA
    Frisbie, S
    Gale, R
    Temkin, H
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2003, 15 (10) : 1398 - 1400
  • [6] Athermal all-polymer arrayed-waveguide grating multiplexer
    Keil, N
    Yao, HH
    Zawadzki, C
    Bauer, J
    Bauer, M
    Dreyer, C
    Schneider, J
    [J]. ELECTRONICS LETTERS, 2001, 37 (09) : 579 - 580
  • [7] Analytical modeling of loss characteristics of a polymer arrayed waveguide grating multiplexer
    Ma, CS
    Guo, WB
    Zhang, DM
    Chen, KX
    Zhao, Y
    Wang, F
    Cui, ZC
    Liu, SY
    [J]. OPTICS AND LASER TECHNOLOGY, 2002, 34 (08): : 621 - 630
  • [8] Parameter optimization and structural design of polymer arrayed waveguide grating multiplexer
    Guo, WB
    Ma, CS
    Zhang, DM
    Chen, KX
    Zhao, Y
    Cui, ZC
    Liu, SY
    [J]. OPTICS COMMUNICATIONS, 2002, 201 (1-3) : 45 - 53
  • [9] Research on technology of polymer 9×9 arrayed waveguide grating multiplexer
    Zhao, Yu
    Chen, Kai-Xin
    Zhang, Da-Ming
    Cui, Zhan-Chen
    Wang, Fei
    Ma, Chun-Sheng
    Yi, Mao-Bin
    [J]. Bandaoti Guangdian/Semiconductor Optoelectronics, 2002, 23 (03):
  • [10] Parameter optimization of a 9 × 9 polymer arrayed waveguide grating multiplexer
    Coll. of Electronic Sci. and Eng., State Key Laboratory on IO, Jilin University, Changchun 130023, China
    [J]. Chin. Phys. Lett., 1600, 6 (810-813):
12345