Status of sensor qualification for the PS module with on-chip PT discrimination for the CMS tracker phase 2 upgrade

The high luminosity upgrade of the LHC is targeted to deliver 3000 fb(-1) at a luminosity of 5 x 1034 cm(-2) s(-1). Higher granularity, 140 collisions per bunch crossing and existing bandwidth limitations require a reduction of the amount of data at module level. New modules have binary readout, on chip p(T) discrimination and capabilities to provide track finding data at 40 MHz to the L1-trigger. The CMS collaboration has undertaken R&D effort to develop new planar sensors for the pixel-strip (PS) module, which has to withstand 1 x 10(15) cm(-2) 1 MeV neutron equivalent fluence in the innermost layer of the tracker. The module is composed of a strip sensor and a macro pixel sensor with 100 mu m x 1.5 mm pixel size. Sensors were characterized in the laboratory and the effects of different process parameters and sensor concepts were studied. This contribution presents a new sensor prototype with n-pixels in p-bulk material in planar technology for the PS module. A new inverted module concept is presented, which has advantages with respect to the baseline concept. Electrical characterization of sensors and SEM-images are presented. (C) 2016 Elsevier B.V. All rights reserved.