Gauge Factor of Titanium/Platinum Thin Films up to 350°C

被引：11

作者：

Schmid, P. ^{[1
]}

Zarfl, C. ^{[1
]}

Balogh, G. ^{[1
]}

Schmid, U. ^{[1
]}

机构：

[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, Floragasse 7, A-1040 Vienna, Austria

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

gauge factor; platinum; electro-mechanical proerties; temperature dependance; film thickness; strain gauge;

D O I：

10.1016/j.proeng.2014.11.611

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this work the influence of the film thickness and titanium as an adhesion promoter on the gauge factor of Platinum thin films used as strain gauges is investigated for different temperatures. Therefore strain gauges with varying bi-layer thickness (Ti/Pt: 50/1000 nm and 20/100 nm) are fabricated and evaluated at a custom-built gauge factor measuring setup. Up to 250 degrees C no substantial difference for the two bi-layers can be found. Latest at 300 degrees C the diffusion of titanium starts to heavily influence predominantly the 20/100 nm Ti/Pt bi-layer system. Moreover a different temperature dependent behavior of the gauge factor under tensile and compressive load is demonstrated. (c) 2014 The Authors. Published by Elsevier Ltd.

引用

页码：172 / 175

页数：4

共 50 条

[1] Titanium-Platinum Thin Films as a Tool for the Electrooxidation of Cyanide
Valiuniene, Ausra
Virbickas, Povilas
Gabriunaite, Inga
Margarian, Zana
Levinas, Ramunas
Janarauskiene, Dagne
Valincius, Gintaras
[J]. COATINGS, 2023, 13 (11)
[2] Influence of thermal annealing on the resistivity of titanium/platinum thin films
Schmid, U.
Seidel, H.
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (06): : 2139 - 2146
[3] THE EFFECTS OF OXYGEN ON COBALT TITANIUM AND COBALT PLATINUM THIN-FILMS
THOMPSON, JA
STEVENSON, DA
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) : 635 - 637
[4] Evaluation of diamond gauge factor up to 500 °C
Yamamoto, Akira
Norio, Nawachi
Takahiro, Tsutsumoto
[J]. DIAMOND AND RELATED MATERIALS, 2007, 16 (08) : 1670 - 1675
[5] Effect of γ-irradiation on the gauge factor of two-dimensional island platinum films
Bishay, A. G.
El-Gamal, S.
[J]. RADIATION PHYSICS AND CHEMISTRY, 2012, 81 (07) : 740 - 744
[6] Effect of high temperature annealing on the electrical performance of titanium/platinum thin films
Schmid, U.
Seidel, H.
[J]. THIN SOLID FILMS, 2008, 516 (06) : 898 - 906
[7] Effect of titanium interlayers on adhesion enhancement of platinum films on titanium oxide films and on temperature coefficient of resistivity of platinum films
Kondo, I
Takahashi, A
Shirai, M
Kondo, K
Takenaka, O
Kusano, E
Kinbara, A
[J]. FIRST INTERNATIONAL CONGRESS ON ADHESION SCIENCE AND TECHNOLOGY - INVITED PAPERS: FESTSCHRIFT IN HONOR OF DR. K.L. MITTAL ON THE OCCASION OF HIS 50TH BIRTHDAY, 1998, : 791 - 801
[8] Microstructural design of advanced architectures in titanium/platinum thin films by laser interference metallurgy
Catrin, Rodolphe
Lasagni, Andres Fabian
Gachot, Carsten
Schmid, Ulrich
Muecklich, Frank
[J]. ADVANCED ENGINEERING MATERIALS, 2008, 10 (05) : 466 - 470
[9] Sol-gel titanium dioxide thin films on platinum substrates: preparation and characterization
Zoppi, RA
Trasferetti, BC
Davanzo, CU
[J]. JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 2003, 544 : 47 - 57
[10] GRAIN-SIZE DEPENDENCE OF GAUGE FACTOR OF THIN METALLIC-FILMS
TELLIER, CR
TOSSER, AJ
[J]. ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1977, 4 (01): : 9 - 17

← 1 2 3 4 5 →