Fast antenna-coupled terahertz detectors based on uncooled thermoelements

被引:0
|
作者
Huhn, A. K. [1 ]
Spickermann, G. [1 ]
Ihring, A.
Schinkel, U.
Meyer, H. -G.
Bolivar, P. Haring [1 ]
机构
[1] Univ Siegen, D-57068 Siegen, Germany
关键词
THERMOELECTRIC FIGURE; THERMAL-CONDUCTIVITY; BI1-XSBX FILMS; MERIT;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on uncooled antenna-coupled thermoelements with a fast response time operating at 0.812 THz. Each sensor pixel consists of 8 thermocouples in series. As thermoelectric structure, a BiSb/Sb freestanding air-bridge is used, fabricated by micromachining. A thermal time constant as low as 22 mu s and a NEP of 130 pW/Hz0.5 at 1 kHz modulation frequency is measured in air at room temperature. The integration capability of the thermocouple sensors enables cost-efficient large-scale detector arrays.
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页数:3
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