Fast antenna-coupled terahertz detectors based on uncooled thermoelements

被引：0
|
作者：
Huhn, A. K. [1 ]
Spickermann, G. [1 ]
Ihring, A.
Schinkel, U.
Meyer, H. -G.
Bolivar, P. Haring [1 ]
机构：
[1] Univ Siegen, D-57068 Siegen, Germany
来源：
2012 37TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2012年
关键词：
THERMOELECTRIC FIGURE; THERMAL-CONDUCTIVITY; BI1-XSBX FILMS; MERIT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on uncooled antenna-coupled thermoelements with a fast response time operating at 0.812 THz. Each sensor pixel consists of 8 thermocouples in series. As thermoelectric structure, a BiSb/Sb freestanding air-bridge is used, fabricated by micromachining. A thermal time constant as low as 22 mu s and a NEP of 130 pW/Hz0.5 at 1 kHz modulation frequency is measured in air at room temperature. The integration capability of the thermocouple sensors enables cost-efficient large-scale detector arrays.
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页数：3
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