MEMS Gyroscope FEM Modeling and Simulation

被引：0

作者：

Nazdrowicz, Jacek ^{[1
]}

Szermer, Michal ^{[1
]}

Stawinski, Adam ^{[1
]}

Napieralski, Andrzej ^{[1
]}

机构：

[1] Lodz Univ Technol, Dept Microelect & Comp Sci, Lodz, Poland

来源：

PROCEEDINGS OF THE 25TH INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEM (MIXDES 2018) | 2018年

关键词：

gyroscope; comb structure; MEMS; Finite Element Method;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper the analysis of a 3D model of MEMS Gyroscope is presented. The FEM analysis of the 3D structure has been performed in very popular COMSOL Multiphysit software. Authors took particular attention on mechanical behaviour particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can he drawn for drive direction.

引用

页码：280 / 284

页数：5

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