Transparent conductive oxide thin films of tungsten-doped indium oxide

被引：54
|
作者：
Li, Xifeng [1 ]
Zhang, Qun [1 ]
Miao, Weina [1 ]
Huang, Li [1 ]
Zhang, Zhuangjian [1 ]
机构：
[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China
来源：
THIN SOLID FILMS | 2006年 / 515卷 / 04期
关键词：
mobility; transparent conductive oxide; tungsten-doped indium oxide; indium oxide; sputtering;
D O I：
10.1016/j.tsf.2006.07.014
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Transparent conductive oxide thin film of tungsten-doped In2O3 (IWO) has been prepared by reactive direct current magnetron sputtering from the tungsten-embedded indium metal target. The effect of tungsten doping content on the optoelectrical properties of IWO films was investigated. The lowest resistivity of 2.7 x 10(-4) Omega(.)cm was reproducibly obtained, with carrier mobility greater than 57 cm(2) V-1 s(-1) and carrier concentration of 4.0 x 10(20) cm(-3), as well as the transmission in visible light range exceeding 80%. X-ray diffraction measurements indicate that the as-deposited IWO films are well crystallized with a preferential orientation of (222). (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：2471 / 2474
页数：4
相关论文
共 50 条
  • [1] Preparation and properties of tungsten-doped indium oxide thin films
    Yuan Li
    Wenwen Wang
    Junying Zhang
    Rongming Wang
    [J]. Rare Metals, 2012, 31 : 158 - 163
  • [2] Preparation and properties of tungsten-doped indium oxide thin films
    LI Yuan
    [J]. Rare Metals, 2012, 31 (02) : 158 - 163
  • [3] Preparation and properties of tungsten-doped indium oxide thin films
    Li Yuan
    Wang Wenwen
    Zhang Junying
    Wang Rongming
    [J]. RARE METALS, 2012, 31 (02) : 158 - 163
  • [4] Transparent conductive tungsten-doped tin oxide polycrystalline films prepared on quartz substrates
    Huang, Yanwei
    Zhang, Qun
    Li, Guifeng
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2009, 24 (01)
  • [5] Molybdenum-doped indium oxide transparent conductive thin films
    Meng, Y
    Yang, XL
    Chen, HX
    Shen, J
    Jiang, YM
    Zhang, ZJ
    Hua, ZY
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (01): : 288 - 290
  • [6] Fabrication and photoelectric properties of tungsten-doped indium oxide films
    Li, Yuan
    Wang, Wen-Wen
    Zhang, Jun-Ying
    [J]. Gongneng Cailiao/Journal of Functional Materials, 2011, 42 (08): : 1457 - 1460
  • [7] Dependence of electrical and optical properties on thickness of tungsten-doped indium oxide thin films
    Zhang, Qun
    Li, Xifeng
    Li, Guifeng
    [J]. THIN SOLID FILMS, 2008, 517 (02) : 613 - 616
  • [8] Transparent conductive tungsten-doped tin oxide thin films synthesized by sol–gel technique on quartz glass substrates
    Yanwei Huang
    Dezeng Li
    Jiahan Feng
    Guifeng Li
    Qun Zhang
    [J]. Journal of Sol-Gel Science and Technology, 2010, 54 : 276 - 281
  • [9] Thickness dependence of optoelectrical properties of tungsten-doped indium oxide films
    Gupta, R. K.
    Ghosh, K.
    Kahol, P. K.
    [J]. APPLIED SURFACE SCIENCE, 2009, 255 (21) : 8926 - 8930
  • [10] Transparent conductive tungsten-doped tin oxide thin films synthesized by sol-gel technique on quartz glass substrates
    Huang, Yanwei
    Li, Dezeng
    Feng, Jiahan
    Li, Guifeng
    Zhang, Qun
    [J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2010, 54 (03) : 276 - 281
12345