Automated control of technological parameters of vacuum equipment to guarantee unbreakable quality check

被引：0
|
作者：
Kozov, A. N. [1 ]
Greenfield, D. [1 ]
Scherbakov, A. V. [1 ]
Filachev, A. M. [1 ]
机构：
[1] RD&P Ctr ORION, Moscow, Russia
来源：
SEVENTH SEMINAR ON PROBLEMS OF THEORETICAL AND APPLIED ELECTRON AND ION OPTICS | 2006年 / 6278卷
关键词：
automated control; technological equipment; evacuation; quality control;
D O I：
10.1117/12.693193
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Discussed are the principles of building automatic control systems for electron- and ion-beam technological equipment. It is shown that such systems must provide unbreakable control of the technological processes, failure-safe evacuation and quality control.
引用
收藏
页数：7
相关论文
共 22 条
  • [21] Critical quality indicators of high-performance polyetherimide (ULTEM) over the MEX 3D printing key generic control parameters: Prospects for personalized equipment in the defense industry
    Vidakis, Nectarios
    Petousis, Markos
    David, Constantine
    Nasikas, Nektarios K.
    Sagris, Dimitrios
    Mountakis, Nikolaos
    Spiridaki, Mariza
    Moutsopoulou, Amalia
    Stratakis, Emmanuel
    DEFENCE TECHNOLOGY, 2025, 43 : 150 - 167
  • [22] Critical quality indicators of high-performance polyetherimide(ULTEM) over the MEX 3D printing key generic control parameters:Prospects for personalized equipment in the defense industry
    Nectarios Vidakis
    Markos Petousis
    Constantine David
    Nektarios KNasikas
    Dimitrios Sagris
    Nikolaos Mountakis
    Mariza Spiridaki
    Amalia Moutsopoulou
    Emmanuel Stratakis
    Defence Technology, 2025, 43 (01) : 150 - 167
123