Automated control of technological parameters of vacuum equipment to guarantee unbreakable quality check

被引：0
|
作者：
Kozov, A. N. [1 ]
Greenfield, D. [1 ]
Scherbakov, A. V. [1 ]
Filachev, A. M. [1 ]
机构：
[1] RD&P Ctr ORION, Moscow, Russia
来源：
SEVENTH SEMINAR ON PROBLEMS OF THEORETICAL AND APPLIED ELECTRON AND ION OPTICS | 2006年 / 6278卷
关键词：
automated control; technological equipment; evacuation; quality control;
D O I：
10.1117/12.693193
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Discussed are the principles of building automatic control systems for electron- and ion-beam technological equipment. It is shown that such systems must provide unbreakable control of the technological processes, failure-safe evacuation and quality control.
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页数：7
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