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Principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board

被引：12
|
作者：
Wang, Dai-Hua [1 ,2 ]
Tang, Lian-Kai [2 ]
Peng, Yun-Hao [2 ]
Yu, Huai-Qiang [3 ]
机构：
[1] Chongqing Univ, Minist Educ China, Key Lab Optoelect Technol & Syst, Chongqing 400044, Peoples R China
[2] Chongqing Univ, Dept Optoelect Engn, Precis & Intelligence Lab, Chongqing, Peoples R China
[3] China Elect Technol Grp Corp, Res Inst 26, Chongqing, Peoples R China
来源：
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES | 2019年 / 30卷 / 17期
基金：
中国国家自然科学基金;
关键词：
Integrated microfluidics; microfluidic pump; piezoelectric pump; printed circuit board; fabrication process; circular piezoelectric unimorph actuator; VALVELESS MICROPUMP; DEVICE; DESIGN;
D O I：
10.1177/1045389X19869519
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Considering mature printed circuit board processes, researches on microfluidic pumps that can be integrated into printed circuit board will provide a solution for further miniaturization and integration of microfluidic systems with low costs. The principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board are proposed and realized in this article. The printed circuit board process-based design and manufacturing technology of a piezoelectric microfluidic pump integrated into printed circuit board is researched utilizing printed circuit board as a platform. The flow characteristics of the fabricated microfluidic pump are experimentally tested. The research results show that the proposed principle and structure of the piezoelectric microfluidic pump can be fabricated utilizing mature printed circuit board process with advantages of simple structure and convenient processing. The fabricated printed circuit board process-based microfluidic pump can linearly pump in and pump out fluid with self-injection. Moreover, the flow rate and back pressure can be controlled by changing the peak-to-peak value, frequency, and phase difference of the driving voltages. The instantaneous flow rate has the pulsation property consistent with the drive voltage frequency. The proposed principle and structure are beneficial to integrate the fabricated printed circuit board process-based microfluidic pump with other microfluidic components to realize complicated microfluidic systems on printed circuit board.
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页码：2595 / 2604
页数：10
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