The nanofabrication of polydimethylsiloxane using a focused ion beam

被引：34

作者：

Guan, Li ^{[1
]}

Peng, Kaiwu ^{[1
]}

Yang, Yanlian ^{[1
]}

Qiu, Xiaohui ^{[1
]}

Wang, Chen ^{[1
]}

机构：

[1] Natl Ctr Nanosci & Technol, Beijing, Peoples R China

来源：

NANOTECHNOLOGY | 2009年 / 20卷 / 14期

基金：

中国国家自然科学基金;

关键词：

SURFACE MODIFICATION; MICROFLUIDIC DEVICE; POLY(DIMETHYLSILOXANE); FABRICATION; LITHOGRAPHY; POLYMERS; ELECTRON;

D O I：

10.1088/0957-4484/20/14/145301

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Nanofabrication on insulating and flexible films of polydimethylsiloxane (PDMS) using a focused ion beam (FIB) has been illustrated in this study. The charge accumulation effect, which is inevitable in polymeric fabrication, was shown to be relieved by simultaneously introducing electron beam flooding in the area exposed to FIB. The topography of the fabricated pattern is subsequently characterized by using an atomic force microscope (AFM), by which the dependence of height/depth of the fabricated arrays on ion beam dose could be obtained. In addition, the swelling effect and milling effect relating to focused ion beam dose could be identified in this study.

引用

页数：5

共 50 条

[1] Focused ion beam machining and deposition for nanofabrication
Davies, ST
Khamsehpour, B
VACUUM, 1996, 47 (05) : 455 - 462
[2] A guided focused ion beam nanofabrication technique using a metal precursor
Haskiya, W. (irish.robotics.academy@hotmail.com), 1600, Inderscience Enterprises Ltd., 29, route de Pre-Bois, Case Postale 856, CH-1215 Geneva 15, CH-1215, Switzerland (10):
[3] Focused ion beam methods of nanofabrication: Room at the bottom
Gerlach, R
Utlaut, M
CHARGED PARTICLE DETECTION, DIAGNOSTICS, AND IMAGING, 2001, 4510 : 96 - 106
[4] Redeposition characteristics of focused ion beam milling for nanofabrication
de Winter, D. A. M.
Mulders, J. J. L.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 2215 - 2218
[5] A nanofluidic emitter tip obtained by focused ion beam nanofabrication
Arscott, S
Troadec, D
NANOTECHNOLOGY, 2005, 16 (10) : 2295 - 2302
[6] Focused ion beam nanofabrication: A comparison with conventional processing techniques
Langford, RM
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2006, 6 (03) : 661 - 668
[7] Three-dimensional nanofabrication of polystyrene by focused ion beam
Lee, C. C.
Proust, G.
Alici, G.
Spinks, G. M.
Cairney, J. M.
JOURNAL OF MICROSCOPY, 2012, 248 (02) : 129 - 139
[8] Deep-Learning-Assisted Focused Ion Beam Nanofabrication
Buchnev, Oleksandr
Grant-Jacob, James A.
Eason, Robert W.
Zheludev, Nikolay I.
Mills, Ben
MacDonald, Kevin F.
NANO LETTERS, 2022, 22 (07) : 2734 - 2739
[9] Integration of single ion implantation method in focused ion beam system for nanofabrication
Yang, Changyi
Jamieson, David N.
Hearne, Sean
Hopf, Toby
Pakes, Chris
Prawer, Steven
Andresen, Soren E.
Dzurak, Andrew
Gauja, Eric
Hudson, Fay E.
Clark, Robert G.
2006 INTERNATIONAL CONFERENCE ON NANOSCIENCE AND NANOTECHNOLOGY, VOLS 1 AND 2, 2006, : 612 - +
[10] Exploring a new strategy for nanofabrication: deposition by scattered Ga ions using focused ion beam
Tripathi, Sarvesh K.
Shukla, Neeraj
Kulkarni, Vishwas N.
NANOTECHNOLOGY, 2009, 20 (07)

← 1 2 3 4 5 →