Calibration verification of a low-cost method for MEMS accelerometers

This paper presents a new low-cost method for calibration of microelectromechanical system accelerometers. A guide way with low friction that can provide a one-directional linear transversal motion is used. For collecting data sets, the accelerometer is moved manually from one reference point to another, and this movement is measured. A function is developed that relates this movement to acceleration. To verify the proposed calibration method, a three-axis table is used to collect data sets and a least-squares algorithm is applied to find the appropriate function. With this low-cost method, the scale factor matrix, the sensitivity matrix, the non-linear scale factor matrix and bias vector are found.