Dislocation scatterings in p-type Si1-xGex under weak electric field

被引:5
|
作者
Hur, Ji-Hyun [1 ,2 ]
Jeon, Sanghun [2 ]
机构
[1] Samsung Adv Inst Technol, Compound Device Lab, Yongin 446712, Gyeonggi Do, South Korea
[2] Korea Univ, Dept Appl Phys, Sejong 339700, South Korea
基金
新加坡国家研究基金会;
关键词
silicon germanium; dislocation; epitaxy; scattering; mobility; GERMANIUM; MOBILITY; GE; SEMICONDUCTORS; GAN;
D O I
10.1088/0957-4484/26/49/495201
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We present a theoretical model which describes hole mobility degradation by charged dislocations in p-type Si1-xGex. The complete analytical expression of the dislocation mobility is calculated from the momentum relaxation time of hole carriers under weak electric field. The obtained dislocation mobility shows a T-3/2/lambda relation and is proportional to the germanium density x. We also suggest a criterion for negating scatterings by dislocations in terms of the controllable parameters such as acceptor dopant density, dislocation density, temperature, and Ge density x, etc.
引用
收藏
页数:5
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