Surface potential measurements using the Kelvin probe force microscope

被引：50
|
作者：
Yasutake, M [1 ]
Aoki, D [1 ]
Fujihira, M [1 ]
机构：
[1] TOKYO INST TECHNOL,DEPT BIOMOLEC ENGN,MIDORI KU,YOKOHAMA,KANAGAWA 226,JAPAN
来源：
THIN SOLID FILMS | 1996年 / 273卷 / 1-2期
关键词：
surface potential; conductivity; atomic force microscopy; Langmuir-Blodgett films;
D O I：
10.1016/0040-6090(95)06772-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The Kelvin probe force microscope (KFM) can measure both the surface potential and the topographic image simultaneously without contacting the sample surface. Furthermore, both conducting and non-conducting thin layers can be measured directly with a millivolt range potential resolution and a sub-micrometer lateral resolution. In this paper, we report two improvements on the KFM which entail a new method of controlling the tip-sample distance to obtain accurate surface potentials, and a new method for increasing the topographic lateral resolution. With these improvements, we can obtain a potential resolution that is less than 1 mV and a lateral resolution of about 10 nm. Also, we report some potential measurements on Langmuir-Blodgett thin films.
引用
收藏
页码：279 / 283
页数：5
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