Replication of optical rib waveguide structures using nickel shims

被引：0
|
作者：
Bruendel, Mathias [1 ]
Henzi, Patric [1 ]
Rabus, Dominik G. [1 ]
机构：
[1] Forschungszentrum Karlsruhe, Inst Microstruct Technol, POB 3640, D-76021 Karlsruhe, Germany
来源：
MICRO-OPTICS, VCSELS, AND PHOTONIC INTERCONNECTS II: FABRICATION, PACKAGING, AND INTEGRATION | 2006年 / 6185卷
关键词：
D O I：
10.1117/12.661865
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The use of conventional fabrication techniques for the fabrication of polymer based photonic integrated waveguide circuits is a necessary step to reduce costs. The replication of rib waveguides is presented using nickel shims. Results of replicated waveguides and 1 x 2 multimode interference (MMI) couplers are shown.
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页数：7
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