Methods for analyzing quality of diffraction gratings for linear-displacement sensors

被引：8

作者：

Shishova, M. V. ^{[1
]}

Odinokov, S. B. ^{[1
]}

Lushnikov, D. S. ^{[1
]}

Zherdev, A. Y. ^{[1
]}

机构：

[1] NE Bauman Moscow State Tech Univ, Moscow, Russia

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 2018年 / 85卷 / 07期

关键词：

D O I：

10.1364/JOT.85.000396

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The fundamental methods for analyzing the parameters of diffraction gratings (DGs) are presented. The features of the application of DGs as measurement scales in a linear-displacement sensor system are analyzed. A method and quality criteria for monitoring the parameters of real samples of measurement scales are proposed. These criteria generalize all diffraction efficiencies that affect the formation of quadrature signals in the system of an interferometric linear-displacement sensor. (C) 2018 Optical Society of America

引用

页码：396 / 400

页数：5

共 50 条

[1] SCANNING INTERFERENCE-TYPE LINEAR-DISPLACEMENT SENSORS
ILIN, VN
MEASUREMENT TECHNIQUES USSR, 1990, 33 (03): : 208 - 212
[2] EFFECT OF ROTATION DURING THE MOVEMENT OF THE DIFFRACTION GRATING IN THE OPERATION OF A LINEAR-DISPLACEMENT CONVERTER
MALAMED, ER
SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1983, 50 (08): : 488 - 491
[3] LASER INTERFERENCE LINEAR-DISPLACEMENT TRANSDUCER
GREBENSCHCHIKOV, AV
LARIN, AV
RUSAKOV, SA
RYABYSHEVA, TV
SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1991, 58 (12): : 792 - 794
[4] DYNAMIC ASPECTS OF PRECISION LINEAR-DISPLACEMENT MEASUREMENT
DICH, LZ
MEASUREMENT TECHNIQUES USSR, 1994, 37 (09): : 1011 - 1014
[5] MUTUAL-INDUCTANCE LINEAR-DISPLACEMENT SENSOR
LABADZE, OS
TALAKHADZE, VA
MEASUREMENT TECHNIQUES USSR, 1988, 31 (10): : 950 - 951
[6] CAPACITATIVE LINEAR-DISPLACEMENT TO FREQUENCY-CONVERTERS
GOLOVANOV, AG
DANIKOV, NI
SHMACHILIN, AS
MEASUREMENT TECHNIQUES USSR, 1987, 30 (07): : 639 - 642
[7] Microlens rasters in linear-displacement transducers with vernier readout
Il'in, VN
JOURNAL OF OPTICAL TECHNOLOGY, 1999, 66 (02) : 153 - 156
[8] LINEAR-DISPLACEMENT TRANSDUCERS FOR SURFACE ACOUSTIC-WAVES
SNITKO, VY
MIZARENE, VI
RAGULSKIS, KM
MEASUREMENT TECHNIQUES USSR, 1985, 28 (01): : 31 - 33
[9] AN AUTOMATIC FRINGE-COUNTING LINEAR-DISPLACEMENT RECORDER
ASTROV, DN
DEDIKOV, YA
ZAKHAROV, AA
MALYSHEV, VM
MEASUREMENT TECHNIQUES USSR, 1985, 28 (04): : 320 - 322
[10] Linear-displacement transducers mount inside mobile cylinders
Schneider, RT
HYDRAULICS & PNEUMATICS, 2002, 55 (08) : 8 - 8

← 1 2 3 4 5 →