Patterning of lead-zirconate-titanate thick-film structures by electrophoretic deposition from ethanol-based dispersions

被引:6
|
作者
Kuscer, Danjela [1 ]
Bernardo, Mara S. [1 ]
Zarnik, Marina Santo [1 ]
Malic, Barbara [1 ]
机构
[1] Jozef Stefan Inst, SI-1000 Ljubljana, Slovenia
关键词
Electrophoretic deposition; Suspensions; Thick film; Piezoelectric; Finite-element analysis; FABRICATION; ELECTRODE; KINETICS; ARRAY;
D O I
10.1016/j.jeurceramsoc.2015.08.033
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We studied the thickness uniformity and homogeneity of lead-zirconate-titanate thick films on gold-coated alumina substrates obtained by constant-current electrophoretic deposition from ethanol-based suspensions with different conductivities. Based on the geometry of the experimental set-up, a finite-element model was constructed. The numerical analyses predicted a non-uniform current-density distribution on the electrodes, which was higher at the edges. We expected a thicker deposit at the edges, which was confirmed by measuring the cross-sectional profile of the as-deposited layer. The thickness non-uniformity was more pronounced for shorter deposition times and when performing the deposition from highly conductive suspensions. In the latter case the rate of deposition was decreased and the homogeneity of the deposits was increased, as evidenced by the scanning electron microscopy images. A homogeneous and uniform layer with a thickness of about 40 pm was prepared from the ethanol-based suspension with a conductivity of 20 mu S/cm after 120 s. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:291 / 297
页数:7
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