MEMS based variable optical attenuator

被引：4
|
作者：
Dai, XH [1 ]
Zhao, XL [1 ]
Li, WJ [1 ]
Cai, BC [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Informat Storage Res Ctr, Shanghai 200030, Peoples R China
来源：
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES | 2001年 / 4601卷
关键词：
MEMS; variable optic attenuator; DWDM;
D O I：
10.1117/12.444720
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Power management is an increasingly concerned issue in Dense Wavelength Division Multiplexed (DWDM) network. It poses strict comprehensive requirements, such as electronic controllability, cost and volume, etc, on the Variable Optical Attenuator (VOA). The characteristics of MEMS technology make it to be one of the most prospective candidates to meet these requirements. This paper consists of three parts. The first part is a description of VOA application in all-optic network. In the light of these aspects, the main requirements for VOA devices are quantitatively identified. In the second part, the current situation of research on MEMS based VOA is presented extensively. Finally, several novel applications of MEMS based VOA in all optic networks are illustrated. It illustrates the premise that MEMS VOA can bring added capability or new functionality to optical designs and increase the incentive to explore their potential in lightwave subsystems. Considering the attractive market volume in 2008, MEMS based VOA seems to be one of the most prospective candidates for the commercialization of optical MEMS technology.
引用
收藏
页码：97 / 103
页数：7
相关论文
共 50 条
  • [11] MEMS variable optical attenuator for volume production
    Vaganov, V
    Hout, SI
    Belov, N
    SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2, 2003, 5116 : 456 - 464
  • [12] Comparison of MEMS variable optical attenuator designs
    Marxer, C
    de Jong, B
    de Rooij, N
    2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST, 2002, : 189 - 190
  • [13] Silicon photonic MEMS variable optical attenuator
    Graziosi, Teodoro
    Sattari, Hamed
    Seok, Tae Joon
    Han, Sangyoon
    Wu, Ming C.
    Quack, Niels
    MOEMS AND MINIATURIZED SYSTEMS XVII, 2018, 10545
  • [14] MEMS variable optical attenuator with a compound latch
    Syms, RRA
    Zou, H
    Stagg, J
    Moore, DF
    MICROELECTRONIC ENGINEERING, 2004, 73-4 : 423 - 428
  • [15] A MEMS variable optical attenuator (VOA) for DWDM applications
    Zhang, XM
    Liu, AQ
    Lu, C
    Tang, DY
    Wang, F
    Liu, ZS
    Lu, C
    DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002, 2002, 4755 : 485 - 495
  • [16] MEMS variable optical attenuator with Vernier latching mechanism
    Unamuno, A
    Uttamchandani, D
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (1-4) : 88 - 90
  • [17] Mechanical stability of a latching MEMS variable optical attenuator
    Syms, RRA
    Zou, H
    Boyle, P
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (03) : 529 - 538
  • [18] Electrostatic MEMS variable optical attenuator with folded micromirror
    Lim, TS
    Ji, CH
    Oh, CH
    Yee, Y
    Bu, JU
    2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2003, : 143 - 144
  • [19] Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror
    Liu, Yingming
    Xu, Jing
    Zhong, Shaolong
    Zhai, Leiying
    Wu, Yaming
    OPTIK, 2013, 124 (20): : 4100 - 4103
  • [20] Deflecting-fiber type MEMS variable optical attenuator
    Wu, MS
    Yang, CS
    Mao, XH
    Zhao, XL
    Cai, BC
    FIBER OPTIC COMPONENTS, SUBSYSTEMS, AND SYSTEMS FOR TELECOMMUNICATIONS, 2001, 4604 : 61 - 66
12345