Strain Measurements With Langasite SAW Resonators at High Temperature

被引:23
|
作者
Li, Ling [1 ]
Peng, Bin [1 ]
Zhu, Jialiang [2 ]
He, Zhengxi [2 ]
Yang, Yuntao [1 ]
Zhang, Wanli [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 611731, Peoples R China
[2] Nucl Power Inst China, Sci & Technol Reactor Syst Design Technol Lab, Chengdu 610213, Peoples R China
关键词
LGS; high temperature; surface acoustic wave; strain sensor;
D O I
10.1109/JSEN.2020.3032477
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The strain sensitivities of the langasite surface acoustic wave resonators are strongly dependent on the temperature, which causes measurement strain to shift greatly at high temperature. To cancel the effect of temperature, a surface acoustic wave strain sensor which consisted of three langasite surface acoustic wave resonators was presented in this work. The surface acoustic wave resonators are configured to ensure that the propagation directions of the surface acoustic wave in the three surface acoustic wave resonators are parallel, perpendicular and at an orientation of 30 degrees to the applied strain. The strain sensitivities of the three surface acoustic wave resonators from room temperature to 250 degrees C were investigated. Functional relationships of the resonance frequency shifts of the three surface acoustic wave resonators due to both the temperature and applied strain were established. It was deduced that the strain was linearly represented by the resonance frequency shifts of the three surface acoustic wave resonators. Experimental results demonstrated that the langasite surface acoustic wave strain sensor was well worked within the temperature range from room temperature to 250 degrees C. The average values of the calculated strains were in agreement with the practical applied strains. There was a little fluctuation between the calculated and preset strains. The measurement error was about 1%. The maximal standard deviation was about 18.5 mu epsilon.
引用
收藏
页码:4688 / 4695
页数:8
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