SiO2/TiO2 omnidirectional reflector and microcavity resonator via the sol-gel method

被引:141
|
作者
Chen, KM [1 ]
Sparks, AW [1 ]
Luan, HC [1 ]
Lim, DR [1 ]
Wada, K [1 ]
Kimerling, LC [1 ]
机构
[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
关键词
D O I
10.1063/1.125462
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of SiO2 and TiO2 were used to fabricate one-dimensional photonic crystal devices using the sol-gel method: an omnidirectional reflector and microcavity resonator. The reflector consisted of six SiO2/TiO2 bilayers, designed with a stopband in the near infrared. Reflectivity over an incident angle range of 0 degrees-80 degrees showed an omnidirectional band of 70 nm, which agrees with theoretical predictions for this materials system. The microcavity resonator consisted of a TiO2 Fabry-Perot cavity sandwiched between two SiO2/TiO2 mirrors of three bilayers each. We have fabricated a microcavity with resonance at lambda=1500 nm and achieved a quality factor of Q=35. We measured a resonance frequency modulation with a change in incident angle of light and defect layer thickness. (C) 1999 American Institute of Physics. [S0003-6951(99)03850-4].
引用
收藏
页码:3805 / 3807
页数:3
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