A spatial phase modulation laser interferometer

被引：2

作者：

Chen, Ke ^{[1
]}

Wang, Zelin ^{[1
]}

Guo, Min ^{[1
]}

Wang, Xiaona ^{[2
]}

Liu, Bowen ^{[2
]}

Wang, Yuming ^{[2
]}

Wang, Yinbo ^{[2
]}

Wang, Senyuan ^{[2
]}

Jin, Jiarong ^{[2
]}

Yu, Qingxu ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Optoelect Engn & Instrumentat Sci, Dalian 116024, Liaoning, Peoples R China

[2] Dalian Univ Technol, Sch Phys, Dalian 116024, Liaoning, Peoples R China

来源：

OPTICS AND LASERS IN ENGINEERING | 2019年 / 121卷

关键词：

Laser interferometer; Two-beam interference; Spatial phase modulation; Wavelength meter; Thickness measurement; OPTICAL-THICKNESS MEASUREMENT; WAVELENGTH MEASUREMENT; REFRACTIVE-INDEX; PLATE; PROFILE; GLASS;

D O I：

10.1016/j.optlaseng.2019.03.019

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose and realize a spatial phase modulation laser interferometer (SPMLI), which mainly consists of a laser source, an optical fiber, a transparent plate and a linear charge coupled device (CCD). The reflected beams from the upper and lower surfaces of the transparent plate produce two-beam interference. The generated spatial phase modulation interference image is taken by the CCD. The spatial frequency of the image is proportional to the wave number of the laser light and the thickness of the transparent plate. Experimental results show that the wavelength and thickness can be measured in picometer-level and nanometer-level resolution, respectively. Compared with other interferometers, the proposed interferometer has the advantages of simple structure, low cost and no need for mechanical scanning components.

引用

页码：74 / 79

页数：6

共 50 条

[31] Phase-conjugate distance-measurement interferometer with frequency modulation of a laser-diode
Ishii, Y
PHOTOREFRACTIVE FIBER AND CRYSTAL DEVICES: MATERIALS, OPTICAL PROPERTIES, AND APPLICATIONS VII, AND OPTICAL DATA STORAGE, 2002, 4459 : 93 - 100
[32] Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation
Suzuki, T
Yazawa, T
Sasaki, O
APPLIED OPTICS, 2002, 41 (10) : 1972 - 1976
[33] Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer
Li, Zhongliang
Wang, Xiangzhao
Huang, Bingjie
Bu, Peng
Zheng, Defeng
3RD INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, PARTS 1-3, 2007, 6723
[34] Laser Self-Mixing Interferometer Based on Multiple Reflections and Phase-Modulation Technique
Wang, Xiulin
Lv, Liping
Zhu, Desheng
Chen, Hanqiao
Huang, Wencai
PHOTONICS, 2022, 9 (06)
[35] Choice of modulation parameters in photothermal-modulation - Laser diode interferometer
Wang, XZ
Lu, HB
Wang, XF
ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 : 387 - 391
[36] Phase modulation homodyne interferometer with a 10-pm resolution using a tunable laser diode
Ishige, Masashi
Matsulura, Fumio
Kawasugi, Masaaki
Aketagawa, Masato
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2007, 8 (02) : 80 - 84
[37] Sinusoidal phase-modulating laser diode interferometer insensitive to the intensity modulation of the light source
Li, Zhongliang
Wang, Xiangzhao
Bu, Peng
Huang, Bingjie
Zheng, Defeng
OPTIK, 2009, 120 (16): : 799 - 803
[38] Phase modulation depth setting technique of a phase-generated-carrier under AOIM in fiber-optic interferometer with laser frequency modulation
Dong, Yisi
Hu, Pengcheng
Ran, Ming
Le, Zhitao
Fu, Haijin
Yang, Hongxing
Yang, Ruitao
OPTICS EXPRESS, 2020, 28 (21): : 31700 - 31713
[39] DIODE-LASER DIRECT MODULATION HETERODYNE INTERFEROMETER
TATSUNO, K
TSUNODA, Y
APPLIED OPTICS, 1987, 26 (01) : 37 - 40
[40] Parameter optimization of the phase microscope with the interferometer as a spatial phase modulator
Izotova, O. A.
Ryabukho, V. P.
OPTICAL METHODS FOR INSPECTION, CHARACTERIZATION, AND IMAGING OF BIOMATERIALS II, 2015, 9529

← 1 2 3 4 5 →