Scanning near-field photolithography-surface photochemistry with nanoscale spatial resolution

被引:72
|
作者
Leggett, Graham J. [1 ]
机构
[1] Univ Sheffield, Dept Chem, Sheffield S3 7HF, S Yorkshire, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1039/b606706a
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
This tutorial review describes recent advances that have challenged the traditional view that the Rayleigh limit, of approximately lambda/2, represents the ultimate resolution accessible using optical methods. Near-field optical methods offer a powerful capability for optical measurement and manipulation of materials. Using a scanning near-field optical microscope coupled to a UV laser it is possible to create photopatterned molecular structures with dimensions nearly 15 times smaller than the Rayleigh limit. Near-field methods offer the possibility for selective initiation of surface chemical transformations with exquisite spatial resolution, bringing the prospect of unifying top-down and bottom-up nanofabrication into view.
引用
收藏
页码:1150 / 1161
页数:12
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