Optimization of Structure of Large Format TES Arrays

被引：2

作者：

Yoshitake, H. ^{[1
]}

Ezoe, Y. ^{[2
]}

Yoshino, T. ^{[1
]}

Mukai, K. ^{[1
]}

Ishikawa, K. ^{[2
]}

Mitsuda, K. ^{[1
]}

Yamasaki, N. Y. ^{[1
]}

Ishisaki, Y. ^{[2
]}

Akamatsu, H. ^{[2
]}

Maeda, R. ^{[3
]}

Takano, T. ^{[3
]}

机构：

[1] Japan Aerosp Explorat Agcy, Inst Space & Astronaut Sci, ISAS JAXA, Sagamihara, Kanagawa 2298510, Japan

[2] Tokyo Metropolitan Univ, Tokyo 1920397, Japan

[3] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2009年 / 19卷 / 03期

关键词：

Transition edge sensor; x-ray microcalorimeter; X-RAY MICROCALORIMETERS; ABSORBER DESIGN; CALORIMETER; RESOLUTION;

D O I：

10.1109/TASC.2009.2019227

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated 16 16 format arrays of 180 square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.

引用

页码：456 / 459

页数：4

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